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Item ID: 245275

1 Offered at Best Price AMAT EPI CENTURA HTF (EPI5) Software Ver: B6.30 CB1 Amps: 300A SBC Type: V452 Flow Point Model: Nano Valve Gas Panel Type: Configurable Wafer Size: 200mm (with conversion kit 150mm is possible) M-Monitor: CRT 3 Chambers ATM EPI With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC) HDD was upgraded to RAID System Tool called "EPI5"   ... other images

Location: Villach, Carinthia

Unit Price	Unstated
Number of Units	1
Manufacturer	Applied Materials
Model	EPI5
Wafer Size Range
Minimum	150 mm
Maximum	200 mm
Set Size	200 mm
Number of Chambers	3
Process Capabilities	ATM EPI PROCESS
Chamber 1 Description	HTF ATM EPI
Chamber 2 Description	HTF ATM EPI
Chamber 3 Description	HTF ATM EPI
Controller Type	Microprocessor Controller Type
Software Revision Level	B6.30
Temperature Control	Dual Pyrometer
Extended Description	Details at FEP_Core_Inspection_Checklist_REV_D_IFX_Villach_Epi5_6137_no_pics.xlsx
Power Requirements	480 V     300.0 A     50 Hz     3 Phase
Year of Manufacture	1996
Condition	Good

OFFERED BY:

(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
IFAT FE PV PCS MNT LS
Regensburg , Bavaria
+49 941 202 2755

 

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 

Payment:

100% downpayment

 

Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria   Make OFFERSend an INQUIRY