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Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System
Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System
S/N : EVP-52041
DOM : 2007
This is a PVD (Physical Vapor Deposition) system for high-quality metal or metal compound deposition with greater efficiency, reliability and lower cost of ownership. This system is comprised of two [2] 2PVD-EX modules, three [3] PCM-X modules, one [1] Degas module, one [1] 4/5PVD-EX module, two [2] wafer transfer modules with one [1] Pass module with one [1] aligner, two [2] loadlock modules and EFEM with one [1] aligner and two [2] load ports. This system processes 300mm SEMI notch wafer.
Tool ID: MDX400
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