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in Other Chemical Vapor Deposition Equipment
Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, CA
Item ID: 195647

Offered1 Offered at Best Price

ASM, E3200, 300mm, Epi Deposition System

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System

Epsilon 3200, Epitaxial Reactor

In the fab.

• Gas Loops:
– Nitrogen (N2) purge
– Hydrogen (H2) carrier and purge
– Hydrogen chloride (HCl) wafer and chamber etch
– Primary silicon source, dichlorosilane (SiH2Cl2, gas)
– Low flow hydrogen chloride (HCl)
– Auxiliary silicon source, silane (SiH4)
– Germanium source, germane (GeH4)
• Advanced application valving (for multilayer sharp-transition processing)

Tool ID: EPI112

ASM, E3200, 300mm, Epi Deposition System

Location: Dresden, Saxony
Unit Price Unstated
Number of Units 1
Manufacturer ASM
Model Epsilon 3200
Description Epi Deposition System
Extended Description  Details at Configuration _EPI112.pdf

OFFERED BY: (click name below to visit its website directly)

Santa Clara , CA
Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.


Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, CA