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FULL DESCRIPTION of Item 195992

in Deep UV Wafer Stepper
Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California
 
Item ID: 195992

Offered1 Offered at Best Price


ASML PAS 5500 - /100D, iLine Stepper, 200mm

ASML  PAS 5500 - /100D, 200mm, 
iLine Stepper
Bagged & Skidded in Warehouse

S/N: 6929

ASML 100 C/D ASTEP-23
PARAMETERSPECIFICATIONMEASURED
1.Illumination  
22.0X22.0 mm [%]<21.69
2.Intensity  
Itensity  [mw/cm2]>900968.73
3.Lens Distortion   
Red Blue
NCE [nm]
Magnification [ppm]
Reticle table tilt Rx[urad]
Reticle table tilt Ry[urad]
Reticle table Height [um]
0.0001<X<78
-3<x<3
-10<X<10
-10<X<10
-10<X<10
64.1
0.025
 2.108
3.305
-0.953
4.FOCAL  
image Tilt Rx[urad]-5<X<53.5
image Tilt Ry[urad]-5<X<5-0.9
Focus height  [um]-0.8<X<-0.6-0.664
6. Overlay  
Machine overlay to /100C or /100D
Reference machine [nm]
X<120
Y<120
Max: 68.4
Max: 70.8 
10.Who did the de-installation?  ASML
FPD[um]
AST[um]
0.40
0.35
0.407
0.189

Tool ID: ASTEP-23


ASML PAS 5500 - /100D, iLine Stepper, 200mm

Location: Singapore,
Unit Price Unstated
Number of Units 1
Manufacturer ASML
Model PAS5500 /100D
Extended Description  Details at Configuration ASTEP-23.pdf

OFFERED BY: (click name below to visit its website directly)

GLOBALFOUNDRIES USED EQUIPMENT
Finance
Santa Clara , California
+1.408.462.4875
 
Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
 
Payment:

All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

 


Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California