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Chemical Vapor Deposition Equipment


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Group Listings into sub-categories under Chemical Vapor Deposition EquipmentGroup Listings into sub-categories under Chemical Vapor Deposition Equipment

List all 11 product types under Chemical Vapor Deposition EquipmentList all 11 product types under Chemical Vapor Deposition Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
245275
Applied Materials  

Applied Materials  

EPI5 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

AMAT EPI CENTURA HTF (EPI5):

Software Ver: B6.30

CB1 Amps: 300A

SBC Type: V452

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

HDD was upgraded to RAID System

Tool called "EPI5"

1   Villach, Carinthia
218746
Applied Materials  

Applied Materials  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Amat P5000 CVD Tool:

P500048

8 inch tool with 4 CVD chambers.

Tool still in Production until (Planned until 3.23) 

1   Villach, Carinthia
245288
AMAT  

AMAT  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

AMAT, P5000, 200mm, S/N 4862:

AMAT, P5000, 200mm, S/N 4862

1   Singapore
246605
Applied Materials  

Applied Materials  

Ultima CENTURA DCVD 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

AMAT, Ultima CENTURA DCVD, 200mm, S/N 302959:

AMAT, Ultima CENTURA DCVD, 200mm, S/N 302959

2 chms. 

 

1   Singapore
242019
ATV Technologie GmbH  

ATV Technologie GmbH  

PEO 602 

List all items of this typeHorizontal LPCVD Furnaces

in LPCVD Furnaces

ATV PEO 602 tube furnace:

This furnace can handle wafers up to 150mm

Configuration:

N2 -  1500 l/min

N2 -    660 l/min

Forming Gas 660l/min

Temperature Control 0°C – up to 500°C max.

Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)

Stainless Steel Calotte 0 – 5kg

1   Warstein, North Rhine-Westphalia
242018
ATV Technologie GmbH  

ATV Technologie GmbH  

PEO 603 

List all items of this typeHorizontal LPCVD Furnaces

in LPCVD Furnaces

ATV PEO 603 tube furnace :

This furnace can handle wafers up to 150mm

Configuration:

N2 -  1500 l/min

N2 -    660 l/min

Forming Gas 660l/min

Temperature Control 0°C – up to 500°C max.

Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)

Stainless Steel Calotte 0 – 5kg

1   Warstein, North Rhine-Westphalia
202834
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

HITACHI KOKUSAI, DJ-1236VN-DF, 300mm:

HITACHI KOKUSAI, DJ-1236VN-DF, 300mm

1   Malta, New York
243313
Hitachi Kokusai Elec  

Hitachi Kokusai Elec  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

HITACHI KOKUSAI, DJ-1236VN-DF, 300mm, s/n: DN23300, FVX2488:

HITACHI KOKUSAI, DJ-1236VN-DF, 300mm, FVX2488

Vertical LPCVD Furnace

1   Malta, New York
219675
LAM Research Corp.  

LAM Research Corp.  

Vector Express 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

LAM, Vector Express, 300mm, S/N D22437A, Ashable Hard Mask CVD:

LAM, Vector Express, 300mm, S/N D22437A, Ashable Hard Mask CVD

1   Malta, New York
223074
Novellus Systems  

Novellus Systems  

Concept Two SPEED 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Novellus Concept Two SPEED (shrink):

1 Mainframe w/ 3 Chambers 

Damages/Deficites: Chamber Turbo Pumps & HF/LF Generators 
EOL: Turbo Pumps

 

no significant failures between last 3 years

1   Dresden, Saxony
238827
Applied Materials  

Applied Materials  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

P5000:

From Chamber B following Parts are missing:

  1. RF Generator
  2. RF Match
  3. Baratron
  4. Turbo/Controller

Chamber B,C,D are universal CVD etch chambers.

1   Villach, Carinthia
240853
Applied Materials  

Applied Materials  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

P5000:

4x Standard SNIT Chambers

1   Villach, Carinthia
242656
Applied Materials  

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000:
CHAMBER A Universal CVDTeos
CHAMBER B Universal CVDTeos
CHAMBER CMark2Etch
CHAMBER DMark2Etch

The Tool is sold with 4 chambers and was productiv until August 2023

1   Villach, Carinthia
242682
Applied Materials  

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000:
CHAMBER A x Universal CVDTeos
CHAMBER B x Universal CVDTeos
CHAMBER Dx Universal CVDTeos

Tool is sold with three chambers and was used in cleanroom until August 2023

1   Villach, Carinthia


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Chemical Vapor Deposition Equipment:
AMAT, Applied Materials, Inc., ATV Technologie GmbH, Hitachi Kokusai Elec, Kokusai, LAM Research Corp., Novellus Systems