KLA-Tencor UV-1050 Thin Film Measurement Tool
KLA-Tencor UV-1050 Thin Film Measurement Tool
- Cassette to Cassette Wafer Handling
- Wafer sizes: 100mm, 150mm & 200mm
- Broadband UV Optics
- Dual Beam Spectrophotometry
- Applications: Polysilicon, UV Reflectivity & Simultaneous Oxide and TiN Thickness for CMP
- System Control PC with Windows NT OS
- Summit Application Software
- GEM / SECS Communication
- System Installation at Destination Available
1 unit @ $55,000.00
MAKE: KLA-Tencor
MODEL: UV-1050
CATEGORY: Other Film Thickness Testers
SELLER: Catalyst Equipmt Co
Austin, TX US
SPECS
| Manufacturer | KLA-Tencor |
| Model | UV-1050 |
| Description | UV Thin Film Measurement Tool |
| Wafer Size Range | |
| Minimum | 100 mm |
| Maximum | 200 mm |
| Set Size | 300 mm |
| Multi-Layer Film Capacity | YES |
| Scanning Stage | YES |
| Wafer Mapping | YES |
| Controller Type | PC Controller Type |
| Condition | Excellent |
| Refurbished | YES |
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