PLASMA-THERM SLR 770 ICP Plasma Etcher
PLASMA-THERM SLR 770 Inductively Coupled Plasma Etcher
- Single Process Chamber with SLR (Shuttle Lock Transfer) Load Lock
- Manual Load with Load Lock Handling Currently Configured for 4” Wafers
- Ceramic Wafer Clamp with Helium Backside Cooling System
- Gas Distribution Box with 5ea Gas Channels
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- RFPP Automatic Matching Network
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- MKS ITR Ion Gauge Controller
- VAT Gate Valve with PM-5 Controller
- Mechanical Roughing Pump
- NESLAB HX-75 Chiller
- Electrical Disconnect Box - 208V, 60Hz, 3 phase
1 unit @ Best Price
MAKE: Plasma-Therm
MODEL: SLR-770
CATEGORY: Other Etchers
SELLER: Catalyst Equipmt Co
Plano, TX US
SPECS
| Manufacturer | Plasma-Therm |
| Model | SLR-770 |
| Wafer Size Range | |
| Minimum | 75 mm |
| Maximum | 200 mm |
| Set Size | 100 mm |
| Process | Inductively Coupled Plasma Etching |
| Controller Type | PC Controller Type |
| End Point Detection | Horiba Jobin-Yvon |
| Loadlock | |
| Loadlock Yes/No | YES |
| Number of Gas Inputs | Five Gas |
| Chillers | |
| Number of Chillers | 1 |
| Chiller #1Manufacturer/Model | Neslab HX-75 |
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