Lam Kiyo Chamber L2301-B
Semiconductor ETC Chamber with RF Cart
Incl. Gasbox and Rocker Valvein production until January 2023
1 unit @ Best Price
MAKE: LAM Research Corp.
MODEL: 2300 Kiyo
CATEGORY: Cluster Plasma Tools - Oxide
SELLER: Infineon
Villach, Austria
SPECS
| Manufacturer | LAM Research Corp. |
| Model | 2300 Kiyo |
| Wafer Size Range | |
| Minimum | 200 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Number of Chambers | 1 |
| Process Capabilities | Plasma Etch |
| Chamber 1 Description | dual zone ESC |
| Controller Type | VME |
| Temperature Control | Single Pyrometer |
| External Cooling | Water Cooled |
| Accessories | Rocker Valve for Installation on V2 Mainframe 16 Slot Gasbox |
| Power Requirements | 100-240 V 41.0 A 50/60 Hz |
| Cooling Water Required | Minimum Temperature: 10 ºC (50 ºF, 283.00 ºK) Maximum Temperature: 50 ºC (122 ºF, 323 ºK) |
| CE Marked | YES |
| Year of Manufacture | 2008 |
| Condition | Good |
S&H
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
Payment
100% downpayment