Trikon Sigma FxP200 RevA mit MX800 Platform
It´s a Trikon Sigma FxP200 with 4 Std RevA DEP Chambers, 1 RevA HSE (not complete),
1 MKII Heat Chamber. Brooks MX800 Platform with 2 Swing Out VCE6 Loadlocks. The
Platform is upgradet from T5 Controller (MX800) to GTM with PC104 Controller. All DEP Chambers HSE and Transport has CTI Onboard 8F Cryos and 2 9600 Cryo Compressor. No Forline Pumps
1 unit @ Best Price
MAKE: Trikon Tech Ltd.
MODEL: Sigma FxP200 RevA
CATEGORY: Other Wafer Production Equipment
SELLER: Infineon
Villach, Österreich
SPECS
| Manufacturer | Trikon Tech Ltd. |
| Model | Sigma FxP200 RevA |
| Description | Trikon/SPTS PVD Tool |
| Wafer Size Range | |
| Minimum | 200 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Accessories | Brooks MX800 Platform with 2 VCE6 Loadlocks, 4 Std. RevA DEP, 1 RevA HSE, 1 MKII Heat. 2CTI 9600 HV Cryo Compressor |
| Other Information | Brooks MKII Platform upgradet to SPTS GTM PC104 |
| Extended Description | Details at Konfiguration SPUT39.xlsx |
| Condition | Good |
| Year of Manufacture | 1999 |
| Power Requirements | 380 V 50 Hz 3 Phase |
S&H
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
Payment
100% downpayment