ITEM ID: 76999

Mactronix UKA-650

Automatic Wafer Transfer Station for 6" Wafers Eureka Senior Series III

1 unit @ Best Price

MAKE: Mactronix

MODEL: UKA-650

CATEGORY: Wafer Transfer Units

SELLER: Catalyst Equipmt Co

Plano, TX US

SPECS

Manufacturer Mactronix
Model UKA-650
Description Automatic Wafer Transfer Station
Other Information
  • Transfers Wafers Between one 25-slot Carrier and One 50 Slot Quartz Boat
  • Carriers/Boats can be Plastic, Teflon, Quartz, Silicon Carbide, Polysilicon and Metal
  • Air Operated
  • Minimized Wafer Contact
  • Preserved Flat Alignment
  • Hard Black Anodized Frame
  • Retainers Default to Closed Position to Prevent Dropping Wafers in the Event of Air Pressure Loss
  • Vacuum Sensors
  • Pressure: 70 to 90 PSI C.D.A. or N2
  • Vacuum: 20"-22" Hg
Exterior Dimensions
Width 8.200 in (20.8 cm)
Depth 12.200 in (31.0 cm)
Height 26.300 in (66.8 cm)

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