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PSK, SUPRA Vm, 300mm, Photoresist Strip, 2 Chambers
PSK, SUPRA Vm, 300mm, Photoresist Strip, 2 Chambers
2013 Vintage,
Stored in warehouse
12" Wafer (300mm), Notch, 25 Slots Cassette
3 Load Ports - EFEM : 5 Axis, 2 Paddle Robot - TM : 5 Axis, 2 Paddle Robot - Wafer Slide Out Mapping Sensor - Cooling Stage - Light Curtatin for Human Safety Two (2) Dual Process Chamber w/Microware Source (2.45GHz, 3KW) - Anodized Aluminum Process Chamber - O-Rings Designed not to be Exposed Plasma - Heater Chuck - Automatic Pressure Control Valve - Chamber Viewport Mounted - IGS Block Type - 4 Lines 3 Sticks 3 MFCs (O2 / N2 / H2N2) - 10 Ra Ultra clean Gas boxes with 316L EP - Regulator w/Pressure Indicator
S/N: PGK13051
Tool ID: PSX21900
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