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in Other Optical Inspection
Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California
Item ID: 196827

Offered 1 Offered at Best Price

ASML AT-850, 300mm, KrF 248nm Scanner


ASML AT-850D, 300mm, KrF 248nm Scanner, 

S/N : m5946

Known Tool Issues:
Currently power off with Lens gas flowing, tool had issue with illumination rack that will require replacement.  The tool currently has all of the parts present, but they have not necessarily been calibrated or setup with the tool being off.  Laser has 104.5 Billion pulses on it.  Components were good when shutdown.
The Beam steering hardware in not functional, and the ACC needs an heat exchanger installed


Tool ID: GB03

Tool ID: GB03

ASML AT-850, 300mm, KrF 248nm Scanner
  Click to see additional image(s)... other images

Location: East Fishkill, New York
Unit Price Unstated
Number of Units 1
Manufacturer ASML
Model AT 850
Description 300mm, KrF 248nm Scanner
Extended Description  Details at LASER PULSE COUNTS ON GB03.pdf
click to view document at right in new windowLens Performance

OFFERED BY: (click name below to visit its website directly)

Santa Clara , California
Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.


Deal directly with Owner:  GLOBALFOUNDRIES USED EQUIPMENT of Santa Clara, California