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TEL, Tactras Vigas LK3, 300mm, Oxide Etch
TEL, Tactras Vigas LK3, 300mm, Oxide Etch S/N : F2141 New in Box with Original packing. Tactras Platform with two Vigus LK3 Chambers: Loader Module 2.0 3x Nitrogen Purged Loadports (PLP) Advanced Purge Station (PST) Interface-A (Freeze1) and Ingenio Software included VTM/LLM pump Carrier ID reader for LP 2x Vigus LK3 chambers 2 x ATCC MP (120deg) S-RDC 16 total Gas Lines Q-ALE kit Syncronized Pulse FC2 chamber hardware Large Turbo Pump (non-heated) C5K Endpoint Detection System Fast Flow Measurement System (FFMS) S2-93 Safety is included CE Marking Chillers are not included
Tool ID: ETX4520
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