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FULL DESCRIPTION of Item 256920

in High Current Implanters 		Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 256920

Offered 1 Offered at $ 982,000.00


Implanter Varian Viision 200+

200 mm Implanter in very good condition

Price net 982k$  based on Incoterm FCA, as is without warranty

 

 Implanter Varian Viision 200+
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Location: Villach, Carinthia
Unit Price $ 982,000.00
Number of Units 1
Manufacturer Varian
Model Viision 200+
Description Implanter
Accessories 

Implant Disc 13 Site, Silicon Coated

Two-dimensional beam profiler

General: Comment I Comment II
Model/Type Viision 200+  
Ser.# ES078108  
Manufacturing Year 1997  
WaferSize 200mm ( 8inch )  
Implant Disc 13 Site, Silicon Coated  
Two-dimensional beam profiler    
     
CE-Mark yes  
Computer System 147MHz Main & ES CPU  
Cleanroom Monitor TFT  
Remote Service Monitor not included  
     
Source/Beamline    
Source Chamber Shield Kit yes 1 included
Bernas Source yes 1 Spare available, on request
Mass Slit Shield Retrofit no  
     
Implant:    
New Infranor Amplifier Xtra Puls yes  
Spin Amp Kollmorgen Servo Star S700 yes  
     
Vacuum:    
Terminal Rough Pump not included Edwards SetUp
Terminal Differential Pump Membran Pump  
Source Turbo Pfeiffer HiPace 1500C
Beamline Turbo Pfeiffer TPH 1201 U P
Endstation Manifold Turbo Pump Pfeiffer HiPace 300
Endstation Rough Pump not included Edwards Setup
Endstation Differential Pump Membran or Scroll Pump  
Cryo Compressor (2x) CTI 9600  
Cryo Pump (4x) CTI 250F  
4th cryo pump installed yes  
50 Hz Frequency Kit yes  
     
Additional Information:    
No Roughing Pumps included    
No Remote TFT included    
     
Gasbox:   calibrated for:
String #1 - SDS MKS-P2A 10 sccm Phosporus
String #2 - SDS UNIT 1662 10 sccm Arsine
String #3 - HP MKS-P2A 10 sccm BF3
String #4 - HP Tylan FC-2900 10 sccm Argon
PFG Unit 8160 5 sccm Xe
External Inert Gas Feed and Purge    

 

 

Other Information 

Serial ID: ES078108

 

Condition Very Good
Year of Manufacture 1997

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
PUR ECB
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria