General: |
Comment I |
Comment II |
Model/Type |
Viision 200+ |
|
Ser.# |
ES078108 |
|
Manufacturing Year |
1997 |
|
WaferSize |
200mm ( 8inch ) |
|
Implant Disc |
13 Site, Silicon Coated |
|
Two-dimensional beam profiler |
|
|
|
|
|
CE-Mark |
yes |
|
Computer System |
147MHz Main & ES CPU |
|
Cleanroom Monitor |
TFT |
|
Remote Service Monitor |
not included |
|
|
|
|
Source/Beamline |
|
|
Source Chamber Shield Kit |
yes |
1 included |
Bernas Source |
yes |
1 Spare available, on request |
Mass Slit Shield Retrofit |
no |
|
|
|
|
Implant: |
|
|
New Infranor Amplifier Xtra Puls |
yes |
|
Spin Amp Kollmorgen Servo Star S700 |
yes |
|
|
|
|
Vacuum: |
|
|
Terminal Rough Pump |
not included |
Edwards SetUp |
Terminal Differential Pump |
Membran Pump |
|
Source Turbo |
Pfeiffer |
HiPace 1500C |
Beamline Turbo |
Pfeiffer |
TPH 1201 U P |
Endstation Manifold Turbo Pump |
Pfeiffer |
HiPace 300 |
Endstation Rough Pump |
not included |
Edwards Setup |
Endstation Differential Pump |
Membran or Scroll Pump |
|
Cryo Compressor (2x) |
CTI 9600 |
|
Cryo Pump (4x) |
CTI 250F |
|
4th cryo pump installed |
yes |
|
50 Hz Frequency Kit |
yes |
|
|
|
|
Additional Information: |
|
|
No Roughing Pumps included |
|
|
No Remote TFT included |
|
|