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Epitaxial Cluster Tools
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Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Number of Chambers
Process Capabilities
Chamber 1 Description
Chamber 2 Description
Chamber 3 Description
Chamber 4 Description
Chamber 5 Description
Chamber 6 Description
Controller Type
Software Revision Level
Interface Type
Elevator Type
Temperature Control
Reduced Pressure
Process Gases
Cassette to Cassette
External Cooling
Other Information
Extended Description
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
Operating Air Pressure
Air Consumption
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
CE Marked
Year of Manufacture
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height