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Manufacturer
Model
Description
Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Number of Positions
Number of Robots
Position 1 Process
Position 1 Tank Material
Position 1 Other Features
Position 2 Process
Position 2 Tank Material
Position 2 Other Features
Position 3 Process
Position 3 Tank Material
Position 3 Other Features
Position 4 Process
Position 4 Tank Material
Position 4 Other Features
Position 5 Process
Position 5 Tank Material
Position 5 Other Features
Position 6 Process
Position 6 Tank Material
Position 6 Other Features
Position 7 Process
Position 7 Tank Material
Position 7 Other Features
Position 8 Process
Position 8 Tank Material
Position 8 Other Features
Position 9 Process
Position 9 Tank Material
Position 9 Other Features
Position 10 Process
Position 10 Tank Material
Position 10 Other Features
Position 11 Process
Position 11 Tank Material
Position 11 Other Features
Position 12 Process
Position 12 Tank Material
Position 12 Other Features
Automatic Wafer Transfer
Automatic Wafer Transfer Type
Controller Type
Software Revision Level
Mini-Environment
Refurbished
Accessories
Other Information
Extended Description
Year of Manufacture
Condition
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
CE Marked
External Cooling
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
Operating Air Pressure
Air Consumption
Vacuum Required
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height
Weight