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Deep UV Wafer Stepper
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Reduction Magnification
Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Wafer Hndlr Size Rng Minimum
Wafer Hndlr Size Rng Maximum
Wafer Hndlr Size Rng Set Size
Wafer Handling
Reticle Plate Size
Site to Site Alignment
Illuminator Model Number
Controller Type
Software Revision Level
Interfaced to PR Track
Interface Type
Environmental Enclosure Provided
Other Information
Extended Description
Year of Manufacture
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
CE Marked
External Cooling
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
Operating Air Pressure
Air Consumption
Vacuum Required
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height