KLA-Tencor ASET-F5x Thin Film Measurement System
KLA-TENCOR ASET-F5x Thin Film Measurement System
- Serial Number 0202802R
- Manufactured in June, 2002
- Inspection Modes Include:
- Dual Beam Spectrometry
- Spectroscopic Ellipsometry
- Film Stress Analysis
- SUMMIT™ Application Software Version 3.21.16
- FTML Version 3.46.06
- Model 300DFF1P Wafer Loading Platform
- Dual Loadports for 300mm Wafers
- Three Axis Wafer Handling Robot
- GEM / SECS Communication
- Inquire for Additional Details
2 units @ Best Price each
MAKE: KLA-Tencor
MODEL: ASET-F5x
CATEGORY: Other Film Thickness Testers
SELLER: Catalyst Equipmt Co
Austin, TX US
SPECS
| Manufacturer | KLA-Tencor |
| Model | ASET-F5x |
| Description | Thin Film Measurement System |
| Wafer Size Range | |
| Minimum | 200 mm |
| Maximum | 300 mm |
| Set Size | 300 mm |
| Illumination Source Type | Multi-wavelength Source |
| Multi-Layer Film Capacity | YES |
| Micro Spot Optics | YES |
| Scanning Stage | YES |
| Wafer Mapping | YES |
| Software Revision Level | SUMMIT 3.21.16 |
| Condition | Excellent |
| Year of Manufacture | 2002 |
| Refurbished | YES |
| CE Marked | YES |
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