ITEM ID: 257675

Cluster Tool: TEL ACT12 + Canon FPA- 5500iZ

TEL ACT12 - Double Block - 300mm + LITVC1-02

1 unit @ Best Price

MAKE: Canon

MODEL: LITVC1-02

CATEGORY: Other Wafer Production Equipment

SELLER: Infineon

Villach, Österreich

SPECS

Manufacturer Canon
Model LITVC1-02
Description Canon FPA- 5500iZ+
Wafer Size Range
Minimum 300 mm
Maximum 300 mm
Set Size 300 mm
Other Information
Block 2:
- 4x Coater Unit (IC Cup)
- 4 Resist Lines / coater Unit
- 11 Resist pumps "RGEN01" with Entegris Filter Manifold
- 1x RRC / EBR nozzle / coater unit
- Back Rinse Nozzle standard
- 2x adhesion (ADH) unit
- 5x chill plate (CPL)
- 6x standard hot plate (LHP)
- 3x high temperature hot plate (HHP)
- 2x Cup wash holder unit incl. Cup wash disc
- 1x Transfer unit (TRS)
- 1x Transfer chill plate (TCP)
Block 3:
- 4x Developer unit
- 2 Developer Lines (SH - Nozzle) / unit
- 1x Rinse Nozzle / unit
- Back Rinse Nozzle standard
3x chill plate (CPL)
4x chilling hot plate (CHP)
5x standard hot plate (LHP)
Interface Block
- connection Canon iZ Stepper
- 1x WEE unit
- 2x Buffer station
- 1x chill plate (CPL)
Extended Description Details at Configuration_overview_LITVC1-02_ACT12_E200052_010325.xlsx
Condition Good
Year of Manufacture 2004
Power Requirements 200-208 V 50/60 Hz 3 Phase
CE Marked YES

S&H

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

Payment

100% downpayment
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