ITEM ID: 259153

CAI519 Canon FPA 3000 i5+

Canon FPA 3000 i5+

General Configuration:

  • FPA 3000 - i5(+)
  • Manufactured in  June / 1997
    • 8“ Wafer Chuck, Notch PA unit
    • 6“ Nikon-type Reticle Changer
    • Reticle Barcode-Reader =   yes
    • Cassette Barcode Reader = yes
    • Pellicle Particle Checker =   yes
    • Online - ESPA =   yes
    • Interface type:   right
    • Standard flys eye lens
    • Chamber type: CD80

1 unit @ Best Price

MAKE: Canon

MODEL: CAI519

CATEGORY: Other Wafer Production Equipment

SELLER: Infineon

Villach, Österreich

SPECS

Manufacturer Canon
Model CAI519
Description Canon FPA 3000 i5+
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Set Size 200 mm
Cassette to Cassette YES
Other Information

Currently exchanged items ( 2023-2025) :

  • Illumination Shutter
  • Stage Laser
  • Cooling Coil Chamber
  • Wafer Feeder Roboter
  • UPS for Workstation

Uniformity / Illumination Data at Lamp hrs 712 h :

uc0:6308

li0:7299

iucVal:2.804

maxVal:105.760

minVal:99.992

areaX:22.0000

areaY:26.0000

pitchX:2.2000

pitchY:2.6000

count:100

Special Illumination Mode 1

Lens NA 0.54 Multiple Stopper sigma 0.77

1st zoom 22.30 [%] input lens none

2nd Zoom Compensator 2 Value Direction

0.0 [%] 44.0 [%] -97.5 [degree]

Condition Good
Year of Manufacture 1997
Power Requirements 50/60 Hz 3 Phase
Weight 3,406 lb (1,545 kg)

S&H

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

Payment

100% downpayment