ITEM ID: 267628

LAM Rainbow 4520 (512-136)

without UI computer, cooler, generator rack and vacuum pump

process gases: Argon, CF4, CHF3, O2, CO, SF6, N2

1 unit @ Best Price

MAKE: LAM

MODEL: Rainbow 4520 Oxide

CATEGORY: Cluster Plasma Tools - Oxide

SELLER: Infineon

Regensburg, Germany

SPECS

Manufacturer LAM
Model Rainbow 4520 Oxide
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Set Size 200 mm
Software Revision Level E1.7-024
Power Requirements 208 V 50.0 A 50/60 Hz
Year of Manufacture 1996
Condition Good
Exterior Dimensions
Width 47.244 in (120.0 cm)
Depth 98.425 in (250.0 cm)
Height 66.929 in (170.0 cm)
Weight 1,764 lb (800 kg)

S&H

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

Payment

100% downpayment