LAM Rainbow 4520 (512-136)
without UI computer, cooler, generator rack and vacuum pump
process gases: Argon, CF4, CHF3, O2, CO, SF6, N2
1 unit @ Best Price
MAKE: LAM
MODEL: Rainbow 4520 Oxide
CATEGORY: Cluster Plasma Tools - Oxide
SELLER: Infineon
Regensburg, Germany
SPECS
| Manufacturer | LAM |
| Model | Rainbow 4520 Oxide |
| Wafer Size Range | |
| Minimum | 150 mm |
| Maximum | 200 mm |
| Set Size | 200 mm |
| Software Revision Level | E1.7-024 |
| Power Requirements | 208 V 50.0 A 50/60 Hz |
| Year of Manufacture | 1996 |
| Condition | Good |
| Exterior Dimensions | |
| Width | 47.244 in (120.0 cm) |
| Depth | 98.425 in (250.0 cm) |
| Height | 66.929 in (170.0 cm) |
| Weight | 1,764 lb (800 kg) |
S&H
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
Payment
100% downpayment