ITEM ID: 35762

Hitachi S-7000

CD SEM Measurement Tool

1 unit @ Best Price

MAKE: Hitachi

MODEL: S-7000

CATEGORY: Critical Dimension Scanning Electron Microscopes

SELLER: Catalyst Equipmt Co

Plano, TX US

SPECS

Manufacturer Hitachi
Model S-7000
Wafer Size Range
Minimum 100 mm
Maximum 150 mm
Set Size 150 mm
Resolution 150.00 Å
Acceleration Voltage
Maximum Voltage 3 kV
Critical Dimension Measurement Range 0.10 µm - 200.00 µm
CD Measurement Resolution 150 Å (15 nm)
Cassette to Cassette YES
Tilting Stage YES
Gun Type Field Emission
Other Information
  • Cassette-to-Cassette Handling for 4”, 5” & 6” Wafers
  • 100X ~ 100,000X Magnification
  • 0.1 ~ 200 µm Measurement Range
  • 15 nm Guaranteed (at 1 kV) Secondary Electron Image Resolution
  • ± 0.02 µm or ±1%, whichever is greater, Reproducibility
  • 0.7 ~ 3 kV (100 V/step)
  • Auto-Focus and Auto-Stigmation
  • Fully Automated CD Measurement
  • Fully Programmable Stage with up to 60° Tilt
  • Multi Point Measurement Capability
Year of Manufacture 1989
Condition Good

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