Vacuum & Pumping Equipment

Vacuum and pumping equipment are essential for maintaining controlled environments in semiconductor manufacturing. They ensure optimal performance and reliability by effectively managing pressure and gas flow.

  1. CTI CRYOGENICS CRYOPUMP 9,000 L/S

    Cryopumps

    CTI CRYOGENICS CRYOPUMP 9,000 L/S

    Cryopump Note: Pumps to be rebuilt once sold; inquire on lead-time.

    Make: CTI Cryogenics

    Model: CRYO-TORR 10--PN 8018236

    9 units @ Best Price

    Scotia, NY US

    Item 39051

  2. BALZERS TPH 2200 TURBO PUMP 2,200 L/S

    Turbo Pumps

    BALZERS TPH 2200 TURBO PUMP 2,200 L/S

    BALZERS  TPH 2200 TURBO PUMP

  3. LEYBOLD OERLIKON TURBO PUMP BEARING CABLE 3 M

    Turbo Pumps

    LEYBOLD OERLIKON TURBO PUMP BEARING CABLE 3 M

    Turbo Pump Drive/Bearing Cable

  4. CTI CRYOGENICS TEMPERATURE INDICATOR

    Cryopumps

    CTI CRYOGENICS TEMPERATURE INDICATOR

    Temperature Indicator

    Make: CTI Cryogenics

    Model: 8042002G003 Temp. Indicator

    4 units @ $700.00

    Scotia, NY US

    Item 77496

  5. VARIAN TURBO PUMP 700 L/S

    Turbo Pumps

    VARIAN TURBO PUMP 700 L/S

    Turbo Pump

    New Surplus

     

  6. PFEIFFER TURBO PUMP WITH OBC V4 PROFIBUS CONTROLLER

    Turbo Pumps

    PFEIFFER TURBO PUMP WITH OBC V4 PROFIBUS CONTROLLER

    Turbopump - New, Never Used

    With OBC V4 Profibus Controller - Used

  7. CTI CRYOGENICS CRYOGENIC VACUUM PUMP 6500 L/S

    Cryopumps

    CTI CRYOGENICS CRYOGENIC VACUUM PUMP 6500 L/S

    Cryogenic Vacuum Pump Pump will be rebuilt once sold

  8. LEYBOLD TURBO PUMP 1150 L/S

    Turbo Pumps

    LEYBOLD TURBO PUMP 1150 L/S

    Rebuilt Turbo Pump P/N 85539

  9. CTI CRYOGENICS CRYOPUMP

    Cryopumps

    CTI CRYOGENICS CRYOPUMP

    Cryopump

    Pump will be rebuilt once sold

    Make: CTI Cryogenics

    Model: ON-BOARD IS 250F

    3 units @ Best Price

    Scotia, NY US

    Item 83241

  10. VARIAN DIFFUSION PUMP

    Diffusion Pumps

    VARIAN DIFFUSION PUMP

    Diffusion Pump

  11. CTI CRYOGENICS REBUILT CRYOPUMP 4,000 L/S

    Cryopumps

    CTI CRYOGENICS REBUILT CRYOPUMP 4,000 L/S

    Rebuilt Cryopump with Temperature Sensor

    Pump to be rebuilt at the time of sale

    Make: CTI Cryogenics

    Model: CRYO-TORR 8 --8033167 with Window

    9 units @ Best Price

    Scotia, NY US

    Item 186768

  12. CTI CRYOGENICS CRYO VACUUM PUMP 2,500 L/S

    Cryopumps

    CTI CRYOGENICS CRYO VACUUM PUMP 2,500 L/S

    Cryogenic Vacuum Pump

    Make: CTI Cryogenics

    Model: ON-BOARD 6--PN 8116183G001

    1 unit @ Best Price

    Scotia, NY US

    Item 43842

Common Applications

chip fabrication

wafer processing

chemical vapor deposition

physical vapor deposition

etching processes

plasma treatment

Buying Guide

Vacuum & Pumping Equipment Buying Considerations

  • Evaluate vacuum level requirements specific to each semiconductor process.
  • Consider pump speed and its impact on cycle time efficiency.
  • Check compatibility with existing system components, including chambers and lines.
  • Factor in maintenance schedules and the availability of service parts.
  • Assess energy consumption and operational cost-effectiveness for long-term savings.

Frequently Asked Questions

What types of vacuum pumps are used in semiconductor manufacturing?
Common types include dry pumps, turbomolecular pumps, and cryogenic pumps.
Why is vacuum equipment critical in semiconductor production?
It maintains the clean and controlled environment required for precise semiconductor fabrication.
What should I consider when selecting a vacuum pump?
Consider the required vacuum level, pump speed, maintenance needs, and compatibility with existing systems.
How do vacuum pumps support energy efficiency in semiconductor plants?
Advanced pumps reduce energy consumption by optimizing operation and decreasing downtime.