Other Wafer Production Equipment
CAI519 Canon FPA 3000 i5+
Canon FPA 3000 i5+
General Configuration:
- FPA 3000 - i5(+)
- Manufactured in June / 1997
- 8“ Wafer Chuck, Notch PA unit
- 6“ Nikon-type Reticle Changer
- Reticle Barcode-Reader = yes
- Cassette Barcode Reader = yes
- Pellicle Particle Checker = yes
- Online - ESPA = yes
- Interface type: right
- Standard flys eye lens
- Chamber type: CD80