AET TECHNOLOGIES Rapid Annealing Furnace
AET TECHNOLOGIES Rapid Annealing Furnace
- 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
- EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
- EUROTHERM 7300A Three Phase Power Controller
- LEYBOLD TTR 91 S Thermovac Vacuum Sensor
- LEYBOLD Display One Single Channel Vacuum Gauge Display
- VAT 24428-KA31 Pneumatic HV Right Angle Valve
- TELSTAR RD-9 Vacuum Pump
- HORIBA SEC-E40 Mass Flow Meter
- HORIBA ROD-1 MB Modular Readout
- Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
- Heating power: 50kW
- Input Power: 380-400VAC; 3Ph; 50Hz 125A
1 unit @ Best Price
MAKE: AET Technologies
MODEL: Rapid Annealing Furnace
CATEGORY: Single Chamber RTP Tools
SELLER: Catalyst Equipmt Co
Plano, TX US
SPECS
| Manufacturer | AET Technologies |
| Model | Rapid Annealing Furnace |
| Description | AET TECHNOLOGIES Rapid Annealing Furnace |
| Accessories | SiC Coated Graphite Susceptors Manual |
| Other Information | On consignment from IET |
| Power Requirements | 380 V 125.0 A 50 Hz 3 Phase |
| CE Marked | YES |
| Year of Manufacture | 2007 |
| Condition | Excellent |
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