Coating & Lithography Systems
Coating & Lithography Systems are essential equipment in semiconductor process equipment applications. They provide reliable performance for industrial operations.
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CAMALOT/SPEEDLINE DISPENSING SYSTEM
Dispensing System
Camalot/Speedline model 1818
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SEALANT EQUIPMENT & ENGINEERING DISPENSE SYSTEM
Positive Displacement Dispense System
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BLE RESPECT AUTOMATIC PHOTORESIST COATER
Automatic Photoresist Coater
System is designed exclusively to coat and bake substrates using spinning and heating techniques.
BLE was acquired by Suss Microtec
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BLE RESPECT AUTOMATIC PHOTORESIST DEVELOPER
System is designed exclusively to develop and bake substrates using spinning and heating techniques
BLE was acquired by Suss Microtec
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HEADWAY RESEARCH MANUAL PHOTORESIST SPIN COATER
Manual Photoresist Spin Coater
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Other Lithography Exposure Tools
Exposure Tool ASML 8" AT1200B
Exposure Tool still in production, located in cleanroom
Excimer Laser type: CYMER XLA165
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Fusion Gemini MCU 8"
The Tool is complete and is working, full usage for its purpose. Electronical manual exists. Located in cleanroom. ProcessUV-HardenProcedureEXP
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Fusion Gemini MCU 8"
The Tool is complete and is working, full usage for its purpose. Electronical manual exists. Located in cleanroom. ProcessUV-HardenProcedureEXP
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CANON FPA 3000 I4 (510-x87)
- console at boxed PC with touch
- NIKON Reticle Changer
- I Line Exposure, x5, 6 inch Reticle, NA 0.63, Cluster Modus Inline
- boxed PC for windows XP need to be rebuild by buyer
Popular Manufacturers
Common Applications
Semiconductor Process Equipment applications
Industrial use
Process equipment
Frequently Asked Questions
What are Coating & Lithography Systems used for?
Do listings include specifications?
What should I check before purchasing?
Are these compatible with existing systems?
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