LAM RESEARCH 2300 Dielectric/Metal Etch Tool
LAM RESEARCH 2300 Dielectric/Metal Etch Tool
- 2300 Platform V2 Etch Transfer Module
- 3ea 200mm Open Cassette Loadports
- Front & Side User Interface Monitors
- CDM Wafer Handling Robot
- 2300 Exelan Flex45 Dielectric Etch Process Module
- OES 2 End Point Detection
- Low Temperature ESC
- Boce 2700 LPM Turbo Pump
- 16 Regulated Gas Channels
- Versys HP Metal Etch Process Module
- OES 2 End Point Detection
- Boce 2200 LPM Turbo Pump
- 16 Regulated Gas Channels
- Microwave Stripper Process Module
- On Board Gas System
- 3 Regulated Gas Channels
- Manufactured in 2023
- Unused Since Installation/Qualification
- All Pumps, Generators & Other Subsystems Included
- PLEASE CONTACT US FOR FURTHER INFORMATION
1 unit @ Best Price
MAKE: LAM Research Corp.
MODEL: 2300
CATEGORY: Cluster Plasma Tools - Other
SELLER: Catalyst Equipmt Co
Tokyo, Japan
SPECS
| Manufacturer | LAM Research Corp. |
| Model | 2300 |
| Wafer Size Range | |
| Minimum | 200 mm |
| Maximum | 300 mm |
| Set Size | 200 mm |
| Number of Chambers | 3 |
| Process Capabilities | Dielectric Etch/Metal Etch/Microwave Strip |
| CE Marked | YES |
| Year of Manufacture | 2023 |
| Condition | Like New |
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