LAM RESEARCH 2300 Dielectric/Metal Etch Tool
LAM RESEARCH 2300 Dielectric/Metal Etch Tool
- 2300 Platform V2 Etch Transfer Module
- 3ea 200mm Open Cassette Loadports
- Front & Side User Interface Monitors
- CDM Wafer Handling Robot
- 2300 Exelan Flex45 Dielectric Etch Process Module
- OES 2 End Point Detection
- Low Temperature ESC
- Boce 2700 LPM Turbo Pump
- 16 Regulated Gas Channels
- Versys HP Metal Etch Process Module
- OES 2 End Point Detection
- Boce 2200 LPM Turbo Pump
- 16 Regulated Gas Channels
- Microwave Stripper Process Module
- On Board Gas System
- 3 Regulated Gas Channels
- Manufactured in 2023
- Unused Since Installation/Qualification
- All Pumps, Generators & Other Subsystems Included
- PLEASE CONTACT US FOR FURTHER INFORMATION
