AMAT P5000 XT (Poly - Trench) #267
Pictures are from parallel tool!
Applied Material P5000XT
-top mount elektronics and He backing
-2 Chamber Narrow Gap tool
-installed pos. Chamber A/B
-Standard Phase 3 Robot
-15 slot storage elevator
-ZA Slit Valves pos. A/B
-Wafer Positioning Sensor (WPS)
-Cassette loadport with 2 stages
-2 Monitor
-System SSD
-CF card Floppy emulator
-MXP Unibody chamber with Narrow Gap lid
-Turbo Seiki STP-301CVB
-Controller Seiki SCU-350D
-MKS Manometer
-7 Gas Sticks / Brooks GF 100 MFCs
-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4
-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)
-2x ENI OEM 12B RF generators
-AC Box at RF Rack
1 unit @ Best Price
MAKE: Applied Materials
MODEL: P5000 XT
CATEGORY: Cluster Plasma Tools - Poly/Nitride
SELLER: Infineon
Regensburg, Germany
SPECS
| Manufacturer | Applied Materials |
| Model | P5000 XT |
| Wafer Size Range | |
| Minimum | 200 mm |
| Set Size | 200 mm |
| Number of Chambers | 2 |
| Process Capabilities | 2x MXP Narrow Gap Pos. A/B |
| Process Gases | Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4 |
| Power Requirements | 208 V 50.0 A 50/60 Hz 3 Phase |
| Year of Manufacture | 1999 |
| Condition | Good |