Cluster Plasma Tools

Cluster plasma tools are specialized semiconductor process equipment used for precise etching of poly and nitride materials. These tools enhance manufacturing efficiency and product quality through consistent performance and durability.

  1. AMAT P5000 XT (Poly - Trench)

    Cluster Plasma Tools - Poly/Nitride

    AMAT P5000 XT (Poly - Trench)

    The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.

    Tool facts:

    Applied Material P5000XT

    -top mount elektronics and He backing

    -2 Chamber Narrow Gap tool

    -installed pos. Chamber A/B

    -Standard Phase 3 Robot

    -15 slot storage elevator

    -ZA Slit Valves pos. A/B

    -Wafer Positioning Sensor (WPS)

    -Cassette loadport with 2 stages

    -2 Monitor

    -System SSD

    -CF card Floppy emulator

    -MXP Unibody chamber with Narrow Gap lid

    -Turbo Seiki STP-301CVB

    -Controller Seiki SCU-350D

    -MKS Manometer

    -7 Gas Sticks / Brooks GF 100 MFCs

    -Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

    -2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

    -2x ENI OEM 12B RF generators

    -AC Box at RF Rack

Popular Manufacturers

Applied Materials

Common Applications

semiconductor fabrication

microelectronics production

integrated circuit manufacturing

wafer processing

dielectrics etching

MEMS production

Buying Guide

Cluster Plasma Tools Buying Considerations

  • Evaluate chamber size and compatibility with existing systems.
  • Assess etch uniformity and process repeatability for consistent results.
  • Consider tool automation features for integration with production lines.
  • Check for surplus availability to maximize budget efficiency.
  • Ensure compatibility with a range of materials including poly and nitride.

Frequently Asked Questions

What are cluster plasma tools used for?
Cluster plasma tools are used in semiconductor manufacturing for the precise etching of poly and nitride materials.
How do cluster plasma tools improve manufacturing?
They enhance process accuracy and efficiency, leading to better yield and quality in semiconductor production.
Can cluster plasma tools handle both poly and nitride?
Yes, they are specifically designed to efficiently process both poly and nitride materials.
Where can I find surplus cluster plasma tools?
Surplus cluster plasma tools can be found on specialized corporate surplus marketplaces like KeySurplus.com.