Atomic Force Microscope AFMScanning Probe Microscope SPM

Stage size: 300mm

Accessories:

• Stage Controller: NanoScope Model 5000C-1
• Scanning Probe Microscope Controller: NanoScope IIIA
• Vibration Isolation Table and Acoustic Enclosure

Simple, Intelligent, Powerful

Ultra Discovery VM delivers Simple, Intelligent and Powerful AOI performance with 10µm line/space inspection capabilities for FC-BGA, PBGA, CSP and COF production.

Delivering super clear images essential for capturing the finest defects, the system achieves outstanding AOI results with minimal effort or training, even on complicated panels. Most of manufacturers’ valuable time on the system is spent inspecting panels. Logic false calls are virtually eliminated and overall false calls are minimized saving precious verification time.

Benefits

• High throughput and superior detection with minimal number of false calls
• Especially designed for inspection of the finest lines down to 10μm
• Quick set-up even for the most complicated jobs for higher productivity
• Automation ready
• Very high uptime

• SIP TechnologyTM

  Push-to-Scan®:

  • A ‘no set-up’ process
  • Top AOI results with minimal effort or training
  • The easiest, user-friendly interface (GUI)
  • Full ‘Step and Repeat’ functions

    Visual Intelligence:

    Using SIP Technology, Ultra Discovery VM introduces Orbotech’s detection paradigm to the world of fine-line FC-BGA, PBGA/CSP and COF production. With the Visual Intelligence Detection Engine – now dedicated for IC substrate applications - manufacturers no longer have to choose between detection and false calls or waste time on non-critical defects. For the first time in AOI, detect all you want, and only what you want.

    Ultra Discovery VM is equipped with a super-fast optical head, which together with its dedicated IC substrate panel understanding, delivers exceptionally high throughput, superior detection and low false call rates. The optical head is specially designed for inspection of the finest lines down to 10µm. The customized professional lens, featuring unique wide angle illumination, delivers very clear images essential for capturing the finest defects.

    Visual Intelligence:

    • Full panel understanding, context-based detection engine
    • Equipped with ultra-fast sensors and powerful data processing for maximum inspection speed

Review Microskop for 6 and 8"

Configuration: Mainframe

Rack of Powersupply is defective – Powersupply is ok

Function is ok – not in production but regular check

Tool on cleanroom floor

1 Palette of spares included:

2x Motion Controller (Newport Modell MM3000)

1x DSP Lock-IN Amplifier

1x Roboter Controller (Pri ESC-212)

1x Hot Chuck Temperatur Box (SDI)

1x Controller Fe Activation Box (SDI)

1x Roboter (Pri ATM-105-1-S)

1x Voltmeter (PDM-40a)

1x Voltmeter (PDM-60V)

1x Function Generator (Wafetek model 29)

1x Aligner (Brooks PRE-200)

2x Power Supply (Bertan 2341-1)

1x Box mit Anleitungen, div. Kleinteilen, Kabel

Nanometrics ECVPro Carrier Concentration Profiler

• For Si, SiC, II-VI, III-V & III-Nitrides 
• Hamamatsu LC8 UV Light Source
• ECVision In-Situ Camera System
• Dual Frequency Measurement
• Carrier Frequency: 0.3kHz to 50kHz
• Depth Range: 0.05μm to 50μm
• Depth Resolution: 1nm 
• Dell PC, Windows 8 OS, ECV Pro SW Version 2.4.6.0

       Installation & Training Available

currently in use

available mid of 2026

KLA-Tencor DSW16E 300mm Calibration Wafer

• Part Number 0210691-000 (Advanced Technology Development)
• For Use on e-Beam Patterned Wafer Defect Inspection Tools  

Bio-Rad Q7 Overlay Metrology Tool

Bio-Rad Q8 Overlay Metrology Tool