About Us Contact Us Terms & Conditions
Serving  Our Guest Log in    Register View prices in  or ...    
ALL CATEGORIES   Semiconductor Mfg   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   Cluster Plasma Tools    View    Search-by-Specs   

FULL DESCRIPTION of Item 255827

in Cluster Plasma Tools - Oxide
Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria
 
Item ID: 255827

Offered 1 Offered at Best Price


Lam Kiyo Chamber L2301-B

Semiconductor ETC Chamber with RF Cart

Incl. Gasbox and Rocker Valve

in production until January 2023
Lam Kiyo Chamber L2301-B
  Click to see additional image(s)... other images

Location: Villach, Carinthia
Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Corp.
Model 2300 Kiyo
Wafer Size Range 
  Minimum 200 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Chambers 1
Process Capabilities Plasma Etch
Chamber 1 Description 

dual zone ESC

Controller Type VME
Temperature Control Single Pyrometer
External Cooling Water Cooled
Accessories 

 Rocker Valve for Installation on V2 Mainframe

16 Slot Gasbox

Power Requirements 100-240 V     41.0 A     50/60 Hz
Cooling Water Required      Minimum Temperature: 10  ºC  (50 ºF, 283.00 ºK)     Maximum Temperature: 50  ºC  (122 ºF, 323 ºK)
CE Marked YES
Year of Manufacture 2008
Condition Good

OFFERED BY:
(click name below to visit its website directly)
Infineon Technologies AG - Equipment Trade
IFAT FE PV PCS MNT LS
Regensburg , Bavaria
+49 941 202 2755
 
Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment
 


Deal directly with Owner:  Infineon Technologies AG - Equipment Trade of Regensburg, Bavaria