WETV18-04 SP304
consisting of the main unit, 3 chemical cabinets and sub-equipment
1 unit @ Best Price
MAKE: LAM Research Corp.
MODEL: WETV18-04
CATEGORY: Other Wafer Cleaners
SELLER: Infineon
Villach, Austria
SPECS
| Manufacturer | LAM Research Corp. |
| Model | WETV18-04 |
| Description | SEZ 304 |
| Wafer Size Range | |
| Minimum | 150 mm |
| Maximum | 300 mm |
| Set Size | 300 mm |
| Number of Robots | 1 |
| Position 1 | |
| Tank Material | PVDF |
| Position 2 | |
| Tank Material | PVDF |
| Position 3 | |
| Tank Material | PVDF |
| Position 4 | |
| Tank Material | PVDF |
| Automatic Wafer Transfer | YES |
| Controller Type | Microprocessor Controller Type |
| Other Information | the system was configured by LAM to allow the chemicals to be pumped up to the cabinets (intermediate tanks for all three media - see photos) and the attached flow plan (no return pumps in the cabinet!).Inline heater for media and DIMain unit: 12-inch system with handler/gripper with flip option; PinchuckIntermediate tanks with Trebor pumpsLevitronix flow meters for heater flow sometimes cause problemsFFU was converted to a different controller/fan (see photos)Chemistry cabinets:Cabinet 1: Main tank (40L) with buffer tank and buffer functionCabinet 2: Main tank (40L) with buffer tank and buffer functionCabinet 3: Pre-tank with 3 paddlewheels/counter and mix pump and main tank (40L) with buffer tank and buffer functionThe chemistry computer motherboard was replaced with a different oneA weld on the drain in Chemistry Cabinet 3 was repaired |
| Extended Description | Details at SP304_Chem_Flowplan.pdf |
| Year of Manufacture | 2016 |
| Condition | Good |
| Power Requirements | Other V 80.0 A |
| CE Marked | YES |
S&H
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
Payment
100% downpayment