IMTEC ACCUBATH CONSTANT TEMPERATURE QUARTZ BATH
Constant Temperature Bath
Cleaning & Surface Prep are essential equipment in semiconductor process equipment applications. They provide reliable performance for industrial operations.
Constant Temperature Bath
Spin Rinse Dryer up to 125mm
Built in Resistivity Monitor
Spin Rinse Dryer up to 125mm
Built in Resistivity Monitor
Mask/Substrate Cleaner - For Parts Only
IPA Vapor Dryer
IPA 2800 is a drying system using isopropyl alcohol to provide a clean,dry surface on wafers and substrates System features a class 10 elevator,ultra-pure nitrogen loading environment, short load-to-vapor time and fast recovery between cycles The system is partical netural at 0.2 microns
This system is NOT a marangoni style
Spray Solvent Tool Refurbished by Rhetech in 2000
Photoresist develop/strip, polymer removal, pre-metal deposition cleaning. High speed rinse and dry of wafers, with low particle counts and reduced DI water consumption.
The tool is working, in good condition and located in clean room
no missing parts
Glass clean
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