Single Chamber RTP Tools

Single Chamber RTP Tools are specialized systems used in semiconductor manufacturing for rapid thermal processing. They enhance processing reliability, crucial for achieving precise and uniform thermal profiles.

  1. AET TECHNOLOGIES Rapid Annealing Furnace

    Single Chamber RTP Tools

    AET TECHNOLOGIES Rapid Annealing Furnace

    AET TECHNOLOGIES Rapid Annealing Furnace

    • 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
    • EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
    • EUROTHERM 7300A Three Phase Power Controller
    • LEYBOLD TTR 91 S Thermovac Vacuum Sensor
    • LEYBOLD Display One Single Channel Vacuum Gauge Display
    • VAT 24428-KA31 Pneumatic HV Right Angle Valve
    • TELSTAR RD-9 Vacuum Pump
    • HORIBA SEC-E40 Mass Flow Meter
    • HORIBA ROD-1 MB Modular Readout
    • Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
    • Heating power: 50kW
    • Input Power: 380-400VAC; 3Ph; 50Hz 125A

    Make: AET Technologies

    Model: Rapid Annealing Furnace

    1 unit @ Best Price

    Plano, TX US

    Item 217150

Common Applications

semiconductor wafer processing

annealing

oxidation processes

dopant activation

silicon growth

nitride deposition

Buying Guide

Single Chamber RTP Tools Buying Considerations

  • Assess the temperature range to match your process needs.
  • Evaluate the uniformity and precision of temperature control.
  • Consider the integration capability with your current setup.
  • Review the system's throughput against production requirements.
  • Check for advanced features like real-time monitoring and feedback control.

Frequently Asked Questions

What is a Single Chamber RTP Tool?
A Single Chamber RTP Tool is used to rapidly heat semiconductor wafers for processing purposes using precise thermal profiling.
Why is rapid thermal processing important in semiconductor manufacturing?
Rapid thermal processing is critical for creating uniform and controlled thermal profiles essential for the quality and reliability of semiconductor devices.
What should I consider when choosing an RTP tool?
Consider factors such as temperature range, uniformity, control features, and integration with existing systems.
Are there specific brands known for RTP tools?
Yes, brands like AMAT, TEL, and Axcelis are well-known for producing quality RTP tools.