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Ion Implantation Equipment


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List all 2 product types under Ion Implantation EquipmentList all 2 product types under Ion Implantation Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
254118
Varian  

Varian  

E500 EHP 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AMAT VARIAN E500 EHP, 200mm, s/n: ES193877:

ION IMPLANTATION SYSTEM

1   Singapore
254119
Varian  

Varian  

EHP 500 

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in Ion Implantation Equipment

AMAT VARIAN EHP 500, 200mm, s/n: ES193496:

ION IMPLANTATION SYSTEM

1   Singapore
249205
Applied Materials  

Applied Materials  

Quantum Leap II 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AMAT, Quantum Leap II, 200mm, S/N Q615:

AMAT, Quantum Leap II, 200mm, S/N Q615

Low Energy Implanter

1   Singapore
254109
AMAT  

AMAT  

Quantum Leap II 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Applied Material Quantum Leap II, 200mm, Q720:

Low Energy Implanter

1   Singapore
254162
Axcelis Technologies  

Axcelis Technologies  

NV-GSD/HE 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

1   Singapore
252684
AXCELIS NV8200P 
AXCELIS NV8200P 

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in Ion Implantation Equipment

AXCELIS NV8200P:

-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605

1   Kulim, Kedah
252685
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

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AXCELIS NV8200P:

MCINV8202

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100001850

1   Kulim, Kedah
256469
Axcelis/Eaton  

Axcelis/Eaton  

NV8250HT 

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in Ion Implantation Equipment

Axcelis NV8250HT:
Equipment Konfiguration: 
Type:NV8250HT
Energy Config:0 - 250Kv Midcurrent
Serialnumber:908
Build Year:2002
Date of first usage:buyed new from vendor
Current Condition: Good
CE-Conformity:Yes
Location:greyroom
Voltage:208V
Cryo-Pumps:3x CTI/Edwards Onboard: OB-8
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003C
Rough-Pumps:Edwards: without QDP40, not included
Endstation Rough-Pump:not included
Wafersize:8inch(200mm)
Clamp-Type:E-Chuck green with Non-µC Controller
Wafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)
Gasbox:Modular 5-String, 4x 2,0L Size
String1:Argon Carriergas; MFC Unit-1662 2sccm BF3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3
String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3
String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
Beam-Profiler Type:Belt-Drive
Gear-Type's:Scan: Planetary  Tilt: Planetary
Source-Type:ELS4 IHC-Source without Vaporizer
HV-Transformer:Silicon-Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSolaris SUN AXI 3HE (Special case)
Second-WorkstationSolaris SUN Sparc5
Software-Version:5.1.4.1
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:177 Type
Notes:Upper-Rack Panel missing
 Clean-Room Table missing on frontside
 all 4 wheels on oil-isolation transformer are broken
 Minor modifications on tool
 No Manual-Set/ no Spares include
 tool was used 24/7 full in production between 15 and 230kv Energy
 If required, tool can be inspected on site, but no Power
1   N* Regensburg, Bavaria
243574
Axcelis Technologies  

Axcelis Technologies  

Optima MD 

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Axcelis, Optima MD, 300mm, s/n: 083011, IMP203:

Axcelis, Optima MD, 300mm, s/n: 083011

Medium Current Implant

1   Dresden, Saxony
243575
Axcelis Technologies  

Axcelis Technologies  

Optima MD 

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Axcelis, Optima MD, 300mm, s/n: 083015, IMP205:

Axcelis, Optima MD, 300mm, s/n: 083015

Medium Current Implant

1   Dresden, Saxony
250598
Axcelis Technologies  

Axcelis Technologies  

OPTIMA_HD 

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1   Dresden, Saxony
251212
Eaton  

Eaton  

GSD200E/80 

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Eaton GSD200E/80 Highcurrent:
Energy Config:0 - 80Kv Highcurrent
Serialnumber:80517
Build Year:2000
Date of first usage:begin of year 2001
Current Condition: Good
CE-Conformity:Yes
Cryo-Pumps:CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!!
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko STP A2203 fully refurbed included!!
Terminal-Rough-Pump:without (Edwards Config)
Endstation Rough-Pump:without (Edwards Config)
Wafersize:200mm
Disk-Type:Si-coated Disk fully refurbed included!!
Wafer-Cooling:no Disk-Chiller included !
Gasbox:5-String, 4x Toxic-Low-Pressure
String1:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String3:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String4:SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String5:Argon Carriergas; MFC Brooks GF120 10sccm-N2
Disk-Drive:Direct-Drive
Dose-Type:Regular
Source-Type:ELS4 IHC-Source without Vaporizer
Hghvoltage-Transformer:Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSUN Solaris AXI 3HE
Second-Workstationwithout
Software-Version:6.13.5.1 (no license included)
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:V6 Type
Conditiontool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024
AvailabilityImmediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers
Notes:slight corrosion spots on the frame, just a visual matter, see IMG_0810_n.jpg
 Clean-Room Table on frontside not included
 Original Lower Machine Front Panels not included (below the Table)
 Rough-Pumps not included
 Endstation Flowhood not included
 Disk-Chiller not included
 modified Plasma-Gun Power-Supply installed(TDK)
 Minor modifications on tool
 No Manual-Set/ no Spares
 If required, tool can be inspected on site
1   Regensburg, Bavaria
256920
Varian  

Varian  

Viision 200+ 

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Implanter Varian Viision 200+:

200 mm Implanter in very good condition

Price net 982k$  based on Incoterm FCA, as is without warranty

 

1 982,263.16 N* Villach, Carinthia


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Ion Implantation Equipment:
AMAT, Applied Materials, Inc., Axcelis Technologies GmbH, Axcelis/Eaton, Eaton, Varian