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Ion Implantation Equipment


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List all 2 product types under Ion Implantation EquipmentList all 2 product types under Ion Implantation Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
259241
AMAT  

AMAT  

Back end Implanter Amat E500 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

AMAT E500:
› Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes
› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP
› OEM Serial ID?ES193741 U2
› Completeness: Total/partial/Donor tool? Please list missing parts.Total
› Date of first usage?NA
› Technic special customized for Infineon?NA
› Correct maintained?Yes
› Any damages/deficits known?No
› Manuals existing?No
› Crated: If yes…/ professional with protocol / partly / simple?No
› Detailed Configuration/Specification of the tool 
› Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS
› Useable for which products?8"  Thin Taiko wafers
› Wafer size (if applicable)?200mm
› Any consumables at end of lifetime?Yes (source, electrode)
› Procured from OEM or from second hand?From IR Singapore
› Any refurbishments done?No
› Any doubts that the tool is failure free useable for the next three years?Yes
› Was there a significant system failure in the last three years?No
› Any contaminations known?BF3, H2
› IFX inventory200016809
location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM
1   Kulim, Kedah
256339
Varian  

Varian  

 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Amat E500:

-Back end medium current Implanter

 

- 100002956

  
1   Kulim, Kedah
252684
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605

1   Kulim, Kedah
252685
AXCELIS NV8200P 
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

MCINV8202

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100001850

1   Kulim, Kedah
256469
Axcelis/Eaton  

Axcelis/Eaton  

NV8250HT 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis NV8250HT #941:
Equipment Konfiguration: 
Type:NV8250HT
Energy Config:0 - 250Kv Midcurrent
Serialnumber:908
Build Year:2002
Date of first usage:buyed new from vendor
Current Condition: Good
CE-Conformity:Yes
Location:greyroom
Voltage:208V
Cryo-Pumps:3x CTI/Edwards Onboard: OB-8
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003C
Rough-Pumps:Edwards: without QDP40, not included
Endstation Rough-Pump:not included
Wafersize:8inch(200mm)
Clamp-Type:E-Chuck green with Non-µC Controller
Wafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)
Gasbox:Modular 5-String, 4x 2,0L Size
String1:Argon Carriergas; MFC Unit-1662 2sccm BF3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3
String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3
String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
Beam-Profiler Type:Belt-Drive
Gear-Type's:Scan: Planetary  Tilt: Planetary
Source-Type:ELS4 IHC-Source without Vaporizer
HV-Transformer:Silicon-Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSolaris SUN AXI 3HE (Special case)
Second-WorkstationSolaris SUN Sparc5
Software-Version:5.1.4.1
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:177 Type
Notes:Upper-Rack Panel missing
 Clean-Room Table missing on frontside
 all 4 wheels on oil-isolation transformer are broken
 Minor modifications on tool
 No Manual-Set/ no Spares include
 tool was used 24/7 full in production between 15 and 230kv Energy
 If required, tool can be inspected on site, but no Power
1   Regensburg, Bavaria
250598
Axcelis Technologies  

Axcelis Technologies  

OPTIMA_HD 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

1   Dresden, Saxony
256920
Varian  

Varian  

Viision 200+ 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

Implanter Varian Viision 200+:

200 mm Implanter in very good condition

Price net 982k$  based on Incoterm FCA, as is without warranty

 

1 982,263.16 Villach, Carinthia


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Ion Implantation Equipment:
AMAT, Axcelis Technologies GmbH, Axcelis/Eaton, Varian