Serving  Our Guest Log in    Register View prices in  or ...    
 MENU OF PRODUCT CATEGORIES    View    Search-by-Specs   
Review Search Results for Listings under

ALL CATEGORIES


» Switch Major Category
Click an item's ID# below for its full specifications and source, or:

Group items into sub-categories under ALL CATEGORIES Group Listings into sub-categories under ALL CATEGORIES

List all 1807 product types under ALL CATEGORIES List all 1807 product types under ALL CATEGORIES

Did not find what you were looking for? Try an expanded search using Google

Your search for Manufacturer: ASM
found:
  • 16 individual listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
195174
ASM  

ASM  

E3200  

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1   Dresden, Saxony
ASM, E3200, 300mm, Epi Deposition System:
ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System
Epsilon 3200, Epitaxial Reactor

In the fab.

• Gas Loops:
– Nitrogen (N2) purge
– Hydrogen (H2) carrier and purge
– Hydrogen chloride (HCl) wafer and chamber etch
– Primary silicon source, dichlorosilane (SiH2Cl2, gas)
– Low flow hydrogen chloride (HCl)
– Auxiliary silicon source, silane (SiH4)
– Germanium source, germane (GeH4)
• Advanced application valving (for multilayer sharp-transition processing)

195647
ASM  

ASM  

Epsilon 3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1   Dresden, Saxony
ASM, E3200, 300mm, Epi Deposition System:

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System

Epsilon 3200, Epitaxial Reactor

In the fab.

• Gas Loops:
– Nitrogen (N2) purge
– Hydrogen (H2) carrier and purge
– Hydrogen chloride (HCl) wafer and chamber etch
– Primary silicon source, dichlorosilane (SiH2Cl2, gas)
– Low flow hydrogen chloride (HCl)
– Auxiliary silicon source, silane (SiH4)
– Germanium source, germane (GeH4)
• Advanced application valving (for multilayer sharp-transition processing)

199194
ASM  

ASM  

E3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1   N* Dresden, Saxony
ASM, E3200, 300mm, Epi Deposition System:

ASM, E3200, 300mm, Epi Deposition System

199195
ASM  

ASM  

E3200  

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1   N* Dresden, Saxony
ASM, E3200, 300mm, Epi Deposition System:

ASM, E3200, 300mm, Epi Deposition System


198212
ASML  

ASML  

PAS5500 /100D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   F* Singapore,
ASML PAS 5500 - /100D, iLine Stepper, 200mm:
ASML PAS 5500 - /100D, iLine Stepper, 200mm

Bagged & Skidded in Warehouse
180601
ASML  

ASML  

/300 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   F* Temecula, California
ASML /300 DUV Stepper - 6":
ASML /300 - DUV Wafer Stepper - 6" Wafer
Refurbished condition, Lens data taken before decommissioning shows good lens quality.
Currently decomissioned, not available for testing.
Lens under N2 Purge, unit stored in cleanroom.
197965
ASM  

ASM  

Epsilon 3200 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

1   F*N* Villach, Carinthia
EPI ASM:
ASM EPI Epsilon 3200
197858
ASML  

ASML  

TWINSCAN XT:850F 

List all items of this typeOptical Inspection - Other

in Optical Inspection Equipment

1   Veldhoven, North Brabant
ASML, XT: 850F, 300mm, KrF, :
ASML, TWINSCAN XT:850F, 300mm, KrF, 

S/N: m7691

Laser model CYMER ELS-7610K (40W)
MES machine type XT850F
OIU/Reticle-/Waf.aux.port Right Configuration
Power 400 Volt

In warehouse stored.

196827
ASML  

ASML  

AT 850 

List all items of this typeOptical Inspection - Other

in Optical Inspection Equipment

1   East Fishkill, New York
ASML AT-850, 300mm, KrF 248nm Scanner:

 

ASML AT-850D, 300mm, KrF 248nm Scanner, 

S/N : m5946

Known Tool Issues:
Currently power off with Lens gas flowing, tool had issue with illumination rack that will require replacement.  The tool currently has all of the parts present, but they have not necessarily been calibrated or setup with the tool being off.  Laser has 104.5 Billion pulses on it.  Components were good when shutdown.
The Beam steering hardware in not functional, and the ACC needs an heat exchanger installed

 

Tool ID: GB03

196930
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Burlington, Vermont
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation

Cold shutdown

Vintage 1997

S/N: 71F5669AE
196931
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Burlington, Vermont
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation



S/N: 71F5669AC







196932
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Burlington, Vermont
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation


Cold, Shutdown

S/N: 71F5669AE


183169
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, NY
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

2011 Vintage
183170
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2540

2011 Vintage

 

Tool ID: FVX2541

 
183417
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2560

183418
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.