ASML /300 DUV Stepper - 6": ASML /300 - DUV Wafer Stepper - 6" Wafer Refurbished condition, Lens data taken before decommissioning shows good lens quality. Currently decomissioned, not available for testing. Lens under N2 Purge, unit stored in cleanroom.
Known Tool Issues: Currently power off with Lens gas flowing, tool had issue with illumination rack that will require replacement. The tool currently has all of the parts present, but they have not necessarily been calibrated or setup with the tool being off. Laser has 104.5 Billion pulses on it. Components were good when shutdown. The Beam steering hardware in not functional, and the ACC needs an heat exchanger installed