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Your search for Manufacturer: Steag-Mattson
found:
  • 2 Listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
182331
Steag-Mattson  

Steag-Mattson  

TiW Etch Tool 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Mattson, Steag, TiW Wet Etch Tool, 300mm, :

TiW Wet Etch Tool, Steag, Mattson, 300mm

This tool had two heated TiW Etch tanks, with a quick dump rinse and hot run rinse per tank. It also has two nitrogen dryers. It chemically etched wafers with an active peroxide solution and used a impedance measurement across the wafer to verify etch end­point was reached. The tool was automated to take wafers out of FOUPs and load them into etch racks which were then each moved through a series of tanks. Data collection and SECS GEM is available. *Tool configuration/specification details. (Potential sources are original quotes, configuration

1   Fishkill, NY
203128
Steag-Mattson  

Steag-Mattson  

300 mm TIW Tool 2 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

1   East Fishkill, New York

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