TEL, Trias, Ru Liner, Barrier/ seed, CVD

3 Chamber,  Warm Idle, 

1-CVD Ru

1 x iPVD TaN

1x iPCVD Cu 

TEL, Lithius-i, ArF, Photoresist Coat Track, 300mm

Bagged & Skidded in Warehouse

TEL, Tactras, Chamber, 300mm, Strip Chamber

TEL, Tactras, Chamber, 300mm, BEOL ETCH Chamber

TEL, Tactras, 300mm, Etch

Vigus HARC

Cold Shutdown

TEL, Etch, Telius SP 304 poly 300mm

S/N: H00660

TEL, Tactras Vigas LK3, 300mm, Oxide Etch

 S/N : F2141

New in Box with Original packing.

Tactras Platform with two Vigus LK3 Chambers:

Loader Module 2.0
3x Nitrogen Purged Loadports (PLP)
Advanced Purge Station (PST)
Interface-A (Freeze1) and Ingenio Software
included VTM/LLM pump
Carrier ID reader for LP
2x Vigus LK3 chambers
2 x ATCC MP (120deg)
S-RDC
16 total Gas Lines
Q-ALE kit
Syncronized Pulse
FC2 chamber hardware
Large Turbo Pump (non-heated)
C5K Endpoint Detection System
Fast Flow Measurement System (FFMS)
S2-93 Safety is included
CE Marking
Chillers are not included

TEL, Etch, 300mm, Certas LEAGA

TEL Indy IRAD, 300mm, Nitride

Installed.  Running

S/N : R00000775225

TEL Indy PLUS, 300mm, SIBCN

Installed.  Running Wafers.

S/N : S00001385094

DOM : 2012

TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly

Bagged & Skidded in Warehouse

TEL, Alpha 303i, 300mm Vertical Furnace, LP P-doped Poly

S/N : L000005Y5389

Bagged & Skidded in Warehouse

TEL, Alpha 303i, 300mm Vertical Furnace, Low Temp

Bagged & Skidded in Warehouse

TEL-NEXX, Tornado, 300mm, Wet  ETCH Tool 

S/N : T00000102

Bagged and Skidded in Storage.