Wafer Steppers

Wafer steppers are critical tools in semiconductor photolithography, enabling precise patterning on silicon wafers. They ensure high resolution and efficiency in chip production.

  1. ASML Twinscan AT 1100 Wafer Scanner

    Wafer Steppers: Deep UV

    ASML Twinscan AT 1100 Wafer Scanner

    ASML Twinscan AT 1100 Wafer Scanner

    • Cymer Nanolith 7600A 193 nm ArF Laser System
    • Dual Wafer Stages, 1ea 200mm & 300mm
    • FOUP Loadport & Open Cassette Wafer Handling
    • 3ea Water Chillers Included
    • All Air Handling Equipment Included
    • Tool Is Crated and Ready for Shipment

Common Applications

integrated circuit fabrication

microelectromechanical systems

CMOS image sensors

LED production

RFID chip manufacturing

thin film deposition

Buying Guide

Wafer Stepper Buying Considerations

  • Evaluate the resolution capabilities to match patterning requirements.
  • Consider the throughput to ensure it meets production volume needs.
  • Check compatibility with various resist materials and coating processes.
  • Review the tool's maintenance requirements and support services.
  • Assess lifecycle costs including initial investment, operation, and maintenance.

Frequently Asked Questions

What is a wafer stepper?
A wafer stepper is a photolithography tool used in semiconductor manufacturing to transfer circuit patterns onto silicon wafers.
Why is deep UV important for wafer steppers?
Deep UV wavelengths allow for finer resolution and patterning on wafers, which is crucial for advanced semiconductor devices.
What industries use wafer steppers?
Wafer steppers are primarily used in the semiconductor industry, particularly in the fabrication of integrated circuits.
How do I choose a wafer stepper?
Consider resolution, throughput, compatibility with resist materials, and the lifecycle cost when choosing a wafer stepper.