IMTEC ACCUBATH CONSTANT TEMPERATURE QUARTZ BATH
Constant Temperature Bath
Wet process equipment is used for etching, cleaning, and preparation of surfaces in industrial settings. Ensuring optimal surface quality, it supports precision and effectiveness in manufacturing workflows.
Constant Temperature Bath
Spray Solvent Tool Refurbished by Rhetech in 2000
Photoresist develop/strip, polymer removal, pre-metal deposition cleaning. High speed rinse and dry of wafers, with low particle counts and reduced DI water consumption.
The tool is working, in good condition and located in clean room
no missing parts
Glass clean
SP203 Mainunit: 6 Inch Bernoulli Handling; Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex; 2 Medium Single Hex; Software: Major Version 117; Minor Version 2015.08.21; Gem Version GEM 5.8;
3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank; Cabinett 2: Maintank and Buffertank; Cabinett 3:
Maintank; Chemistry Controller-Dos
Wafer Size Range
Minimum: 150 mm
Maximum:150 mm
Set Size: 150 mm
Problems: Keyboard switching; voltage fluctuations; chemistry-cabinets heavily used; chemistry computer not original; modifications; FFU controller; 1 cabinet drain box repaired;
SP304 Mainunit: The system is equipped with 8-inch Bernoulli handling, Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck; Cold DI in Nozzle; Hot DI in Dispenser; exhaust up; heat exchangers: 1x double hex with Lauda for Di, 1x double hex with Lauda for Medium 2; 1x single hex with Lauda for Medium 1 (not used), 1x single hex with Lauda for Medium 3;
Chemistry: 2 cabinets with Maintank and Buffertank and with Mixtank with 3 Paddle wheels to fill and with Pressure regulator for the facility lines; with a Drainpumpstation.
Problems: Chemistry cabinets are used; some parts in the tool are corroded; the tool has been repaired and converted to Bernoulli handling by PTW; software adjustments have been made.
Wafer Size Range:
Minimum: 200mm
Maximun: 200mm
Set Size: 200mm
Completeness partial
- Z80 missing
- CDS not running
- Tool is EOL
WET Clean Strip (8''tool), Currently the tool still working.
Constant Temperature Bath with MicroTemp Series Process Controller
QA Series
Spray Solvent Tool
Rhetech Semitool WST 306 MG
Log in with your username/email address