Serving  Our Guest Log in    Register View prices in  or ...    
ALL CATEGORIES   Semiconductor Mfg   Wafer Fabrication Eq   Lithography Eq   View   Search-by-Specs   
View All Listings Under

Exposure Tools


» Switch Major Category
Click an item's ID# below for its full specifications and source, or:

Group Listings into sub-categories under Exposure ToolsGroup Listings into sub-categories under Exposure Tools

List all 8 product types under Exposure ToolsList all 8 product types under Exposure Tools


  • To sort on a column, click the column head; click it again to reverse the sort.
  • Click the links under the Product Type column head to see other like items of that type.
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
180601
ASML  

ASML  

/300 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   F* Temecula, California
ASML /300 DUV Stepper - 6":
ASML /300 - DUV Wafer Stepper - 6" Wafer
Refurbished condition, Lens data taken before decommissioning shows good lens quality.
Currently decomissioned, not available for testing.
Lens under N2 Purge, unit stored in cleanroom.
199718
ASML  

ASML  

PAS5500 /1100 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   N* Burlington, Vermont
ASML PAS 5500/1100, 200mm, 193nm, Scanner:



ASML 193nm 5500/1100 Scanner
192501
Brewer Science  

Brewer Science  

300x 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Malta, New York
Brewer Science, 300 X, Resist Coater, 300mm:
Brewer Science,  300 X, Resist Coater, 300mm

Resist Coater
192500
Brewer Science  

Brewer Science  

CEE 2000 FX 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Malta, New York
Brewer Science, CEE 200 FX, Resist Coater, 300mm:
Brewer Science, CEE 200 FX, Resist Coater, 300mm

photoresist coater

197661
Canon  

Canon  

FPA-1550 M4-W 

List all items of this typeG-Line Wafer Steppers

in Wafer Steppers

1   F* Villach, Carinthia
195725
Cymer  

Cymer  

EX-5700 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   F* Burlington, Vermont
Cymer, EX-5700, DUV Laser, 248nm, :
Cymer, EX-5700, DUV Laser, 248nm,  

for Nikon NSR-2205Ex14/12 248nm Steppers

S/N : 96CC701812

DOM : 1996
195726
Cymer  

Cymer  

EX-5700 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   F* Burlington, Vermont
Cymer, EX-5700, DUV Laser, 248nm, :
Cymer, EX-5700, DUV Laser, 248nm,  

for Nikon NSR-2205Ex14/12 248nm Steppers

S/N : 97CC703710

DOM : 1997
195517
Nikon  

Nikon  

NSR-2205EX14C 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   F* Singapore,
Nikon, Lithography, NSR-2205EX114C 200mm, DUV Stepper:
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper

!!!Multiple Units Available!!!  Please inquire

Bagged & Skidded in warehouse.

S/N : 7573125

Below is the laser history:
 
D151Total shots 34486
D153F. Window 7035
D154R. Window 7035
D155Chamber  7035
D156MFT  7035
D157O.C  332
D158LNM  33565
D159WSM  33565
D160HVPS  6584
D161Comp. Head 34486
D162Commutator 6952
D163Beam splitter 33565
D165F2 Trap  1478
D167Bearing hour 8097
D79Bandwidth 0.35
D108E. Sigma  1.9
Com Port Status  1TW   
Laser Software Version ELS-5410 v5.1   





197418
Nikon  

Nikon  

NSR-2205EX14C 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   Singapore,
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper:
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper

Bagged & Skidded in Warehouse
199682
Nikon  

Nikon  

NSR-2205EX14C 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   N* Singapore,
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper:
Nikon, Lithography, NSR-2205EX14C 200mm, DUV Stepper
195529
Nikon  

Nikon  

NSR-S620D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Steppers

1   F* Dresden, Saxony
Nikon, NSR-S620D, 300mm, ArF Immersion Scanner:
Nikon, NSR-S620D, 300mm, ArF Immersion Scanner

Laser is a Cymer Laser 
 
Laser Model: XLR-640IX 
SN: 41391 
Software Version: 12.8.1
NERD+GLX Option 
NAFFA
 
The Tool is still in production
192499
Quintel  

Quintel  

7000 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   Malta, New York
QUINTEL, 7000, Mask Aligner, 300mm:
QUINTEL, 7000, Mask Aligner, 300mm

contact mask aligner
195237
Suss MicroTec  

Suss MicroTec  

MA-200E 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   East Fishkill, New York
SUSS Microtech, MA-200E, Exposure Tool, 200mm:
SUSS Microtech, MA-200E, Exposure Tool, 200mm


Q & A :

Q: What size is the lamphouse?  A: type ZE1000G/175944 1500W 

Q:  What is the lamp intensity (mW) for this machine? A: We typically used 30 mW/sq cm at the wafer.  The machine could provide more intensity with a new lamp.

Q: What filter is available? A: We used G, H and I line together. Other filters are possible and available from Suss. 

Q: What is the model of power supply does it have? A: CIC1200/157308L

Q: Is the software using Window base? A: Yes

Q: What model microscope is on the tool? A:  DVM 8 Dual video Microscope

Q: What is the current status and condition? Any known problems? A: Working condition, no issues

Q: Does it have BSA – backside alignment? A: No BSA

Q: Is it able to run 6in and 8in? Does it have mask plate for both 6in and 8in?  A: Tool is set up for 10" masks and 8" wafers.  At Suss it was tested with 9" masks, possible with another mask holder.  The tool can be setup for 6" wafers but we have no experience with this.  Never ran 6" wafers.

Q: What is the microscope magnification? A: Please confirm at inspection.

Q: Is there chiller given together with the machine? A: No


180602
Ultratech, Inc.  

Ultratech, Inc.  

1500 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

1   F* Regensburg, BY
Ultratech 1500 - Wafer Stepper - 6":
Used Ultratech 1500 - 6" Wafer Stepper


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Exposure Tools:
ASML, Brewer Science, Canon, Cymer, Nikon, Nikon, Quintel, Suss MicroTec, Ultratech, Inc.