Medium Current Implanters

Medium current implanters are specialized tools used in semiconductor manufacturing to implant ions into silicon wafers for precise doping processes. These machines enhance semiconductor device performance and reliability by enabling controlled electrical characteristics.

  2. Axcelis NV8250HT #941

    Medium Current Implanters

    Axcelis NV8250HT #941

    Equipment Konfiguration: Type:NV8250HTEnergy Config:0 - 250Kv MidcurrentSerialnumber:908Build Year:2002Date of first usage:buyed new from vendorCurrent Condition: GoodCE-Conformity:YesLocation:greyroomVoltage:208VCryo-Pumps:3x CTI/Edwards Onboard: OB-8Cryo-Kompressor:CTI 9650 Low-VoltageTurbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003CRough-Pumps:Edwards: without QDP40, not includedEndstation Rough-Pump:not includedWafersize:8inch(200mm)Clamp-Type:E-Chuck green with Non-µC ControllerWafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)Gasbox:Modular 5-String, 4x 2,0L SizeString1:Argon Carriergas; MFC Unit-1662 2sccm BF3String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3Beam-Profiler Type:Belt-DriveGear-Type's:Scan: Planetary  Tilt: PlanetarySource-Type:ELS4 IHC-Source without VaporizerHV-Transformer:Silicon-OilLight-Tower:red/yellow/green; no buzzerMain-WorkstationSolaris SUN AXI 4HE PH: 200978Second-WorkstationSolaris SUN Sparc5Software-Version:5.1.4.1Network:24port 100MB Ethernet with Cisco Router-KitCell-Controller:177 TypeNotes:Upper-Rack Panel missing Clean-Room Table missing on frontside all 4 wheels on oil-isolation transformer are broken Minor modifications on tool No Manual-Set/ no Spares include tool was used 24/7 full in production between 15 and 230kv Energy If required, tool can be inspected on site, but no Power
  3. AXCELIS NV8200P

    Medium Current Implanters

    AXCELIS NV8200P

    MCINV8202

    › Original Equipment Manufacturer? Axcelis

    › Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

    › A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

    › Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

    › Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

    › Date of first usage? 2006

    › Technic special customized for Infineon? We don’t use water cool for the platen.

    › Correct maintained? Yes.

    › Any damages/deficits known? No

    › Manuals existing? Yes.

    › Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

    › Any upgrades / extensions? No.

    › Useable for which products? 8 inch product

    › Wafer size (if applicable)? 8 inch

    › Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

    › Procured from OEM or from second hand? Second hand.

    › Any refurbishments done? No.

    › Any doubts that the tool is failure free useable for the next three years? No.

    › Was there a significant system failure in the last three years? No.

    › Any contaminations known? No

    › IFX Inventory number? 100001850

  4. AXCELIS NV8200P

    Medium Current Implanters

    AXCELIS NV8200P

    -MCINV8201

    › Original Equipment Manufacturer? Axcelis

    › Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

    › OEM Serial ID?

    › Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

    › Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

    › Manufacturing date of the Equipment ?

    › Date of first usage? 2006

    › Technic special customized for Infineon? We don’t use water cool for the platen.

    › Correct maintained? Yes.

    › Any damages/deficits known? No

    › Manuals existing? Yes.

    › Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

    › Any upgrades / extensions? No.

    › Useable for which products? 8 inch product

    › Wafer size (if applicable)? 8 inch

    › Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

    › Procured from OEM or from second hand? Second hand.

    › Any refurbishments done? No.

    › Any doubts that the tool is failure free useable for the next three years? No.

    › Was there a significant system failure in the last three years? No.

    › Any contaminations known? No

    › IFX Inventory number? 100000605

Common Applications

semiconductor doping

wafer processing

microelectronics production

solar cell manufacturing

data storage device fabrication

LED manufacturing

Buying Guide

Medium Current Implanter Buying Considerations

  • Evaluate the ion species offered by the implanter for flexibility in applications.
  • Consider the tool's compatibility with different wafer sizes for operational efficiency.
  • Check the precision and uniformity of ion distribution for optimal doping results.
  • Assess the machine's maintenance requirements and availability of replacement parts.
  • Ensure the implanter adheres to industry standards for safety and performance.

Frequently Asked Questions

What are medium current implanters used for?
Medium current implanters are used to introduce impurities into semiconductor wafers to alter their electrical properties.
How do medium current implanters benefit semiconductor manufacturing?
They provide precise control over doping levels, which is critical for producing high-performance semiconductor devices.
What factors should be considered when choosing a medium current implanter?
Consider the beam current capability, energy range, and wafer throughput of the implanter.
Which industries commonly use medium current implanters?
These implanters are predominantly used in the semiconductor manufacturing and electronics industries.