Spray Solvent Tool Rhetech Semitool WST 306 MG

Recirculating Quartz Bath

Constant Temperature Bath

Semi-Automatic Centrifugal Cleaning System Used for cleaning electronic assemblies Three step process.: Washing, rinsing, drying

• Circuit assemblies
• Precision parts
• Medical devices
• Bumper wafers
• Flip chips , MCMs, BGAs, and hybrid circuits No drain or waste water treatment required Automatic recovery of solvents from waste water Four stage water purification process

Spray Solvent Tool Refurbished by Rhetech in 2000

Photoresist develop/strip, polymer removal, pre-metal deposition cleaning. High speed rinse and dry of wafers, with low particle counts and reduced DI water consumption.

WET Clean Strip (8''tool), Currently the tool still working.

WET Clean Strip (8''tool)

SP203 Mainunit: 6 Inch Bernoulli Handling; Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex; 2 Medium Single Hex; Software: Major Version 117; Minor Version 2015.08.21; Gem Version GEM 5.8;

3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank; Cabinett 2: Maintank and Buffertank; Cabinett 3:

Maintank; Chemistry Controller-Dos Wafer Size Range

Minimum: 150 mm

Maximum:150 mm

Set Size: 150 mm

Problems: Keyboard switching; voltage fluctuations; chemistry-cabinets heavily used; chemistry computer not original; modifications; FFU controller; 1 cabinet drain box repaired;

• No Spare Parts available
• dismantling date: We can dismantle the tool in May 2026 
• Expected date of availability for the buyer: July 2026

SP304 Mainunit: The system is equipped with 8-inch Bernoulli handling, Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck; Cold DI in Nozzle; Hot DI in Dispenser; exhaust up; heat exchangers: 1x double hex with Lauda for Di, 1x double hex with Lauda for Medium 2; 1x single hex with Lauda for Medium 1 (not used), 1x single hex with Lauda for Medium 3;

Chemistry: 2 cabinets with Maintank and Buffertank and with Mixtank with 3 Paddle wheels to fill and with Pressure regulator for the facility lines; with a Drainpumpstation.

Problems: Chemistry cabinets are used; some parts in the tool are corroded; the tool has been repaired and converted to Bernoulli handling by PTW; software adjustments have been made.

Wafer Size Range:

Minimum: 200mm

Maximun: 200mm

Set Size: 200mm

• No Spare Parts available
• dismantling date: We can dismantle the tool in June 2026 
• Expected date of availability for the buyer: August 2026

Applied Materials Raider Edge ECD Liftoff Tool

• 3ea Process Tanks
• 2ea Chemical Dispense Cabinets
• HCl, Dilute HF, NH4OH, H2O2, Piranha & Chrome Etch
• Please Inquire for Additional Details

Constant Temperature Bath with MicroTemp Series Process Controller QA Series

Process Tank/Heater/Process Controller Compatible with sulphuric, nitric or acetic acids, various strippers even KOH and HF.