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Wafer Manufacturing Equipment


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Group Listings into sub-categories under Wafer Manufacturing EquipmentGroup Listings into sub-categories under Wafer Manufacturing Equipment

List all 30 product types under Wafer Manufacturing EquipmentList all 30 product types under Wafer Manufacturing Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
195986
Akrion  

Akrion  

300mm Solvent Sink 

List all items of this typeWafer Cleaners - Other

in Wafer Cleaners

1   Singapore,
AKRION, 300mm, Solvent Sink:
AKRION, 300mm, Solvent Sink


181803
Akrion  

Akrion  

V3 

List all items of this typeWafer Cleaners - Other

in Wafer Cleaners

1   F* Singapore,
AKRION, V3, 200mm, wafer, chemical resist strip:
AKRION, V3, 200mm, wafer, chemical  resist strip

Tool ID: CRSSA-01
192482
Applied Komatsu Tech  

Applied Komatsu Tech  

1600 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   F* Malta, New York
AKT, 1600, PVD, Sputter Deposition, 300mm:
AKT, 1600, PVD, Sputter Deposition, 300mm

PVD Cluster tool including process chambers (Al 2x, Cu, Ti, sputter etch) configured for 300 mm square

Configured for 300mm square, but handles up to 360mm x 460mm gen2 FPD panels

1997
199193
Applied Materials  

Applied Materials  

Reflexion 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   N* East Fishkill, New York
Applied Materials Reflexion, 300mm, CMP:

Applied Materials Reflexion  300mm CMP

!!!Multiple Units Available!!! 
Please inquire

198213
Applied Materials  

Applied Materials  

Centura RTP XE+ 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   F* Singapore,
Applied Materials, Centura, RTP XE+, 200mm:
Applied Materials, Centura, RTP XE+, 200mm
TPCC Platform

Bagged & Skidded in Warehouse

2003 vintage

S/N: 400654
191508
Applied Materials  

Applied Materials  

Centura RTP XE 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
Applied Materials, Centura, RTP XE, 200mm:
Applied Materials, Centura, RTP XE, 200mm

S/N: R026
198239
AXIDEN  

AXIDEN  

APR 4300 Pod Regenerator 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Malta, New York
AXIDEN, APR 4300, 300mm Pod Regenerator:
AXIDEN,  APR 4300, 300mm Pod Regenerator

194728
Canon Anelva  

Canon Anelva  

C5100GT 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   F* Dresden, Saxony
Canon Anelva, C-5100GT, 300mm PVD, Gate Last Metal Deposition System:
Canon Anelva, C-5100GT, 300mm PVD, Gate Last Metal Deposition System



S/N : EVP-55608

DOM : 2010
 
This is a PVD (Physical Vapor Deposition) system for high-quality metal or metal compound
deposition with greater efficiency, reliability and lower cost of ownership. This system is comprised of
two [2] PCM-Xs modules, two [2] PCM-X modules, one [1] Degas module, one [1] wafer transfer
module with one [1] Aligner module, two [2] loadlock modules and EFEM with one [1] aligner
and three [3] load ports. This system processes 300mm SEMI notch wafers.
199378
Canon Anelva  

Canon Anelva  

C-7100GT 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   N* East Fishkill, New York
Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System:

Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System

192338
Canon Anelva  

Canon Anelva  

C-7100GT 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   F* Dresden, Saxony
Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System:
Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System

S/N : EVP-52041

DOM : 2007

This is a PVD (Physical Vapor Deposition) system for high-quality metal or metal compound
deposition with greater efficiency, reliability and lower cost of ownership. This system is
comprised of two [2] 2PVD-EX modules, three [3] PCM-X modules, one
[1] Degas module, one [1] 4/5PVD-EX module, two [2] wafer transfer modules with one [1] Pass
module with one [1] aligner, two [2] loadlock modules and EFEM with one [1] aligner and two [2] load ports.
This system processes 300mm SEMI notch wafer.

192942
Carl Zeiss  

Carl Zeiss  

MeRit MG65 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   F* Burlington, Vermont
Carl Zeiss, MeRit MG65 Plus, Mask Repair, e-beam, :
Carl Zeiss, MeRit MG65 Plus, Mask Repair, e-beam, 

S/N : 41112000010109

DOM : June 2007
185282
Dainippon Screen  

Dainippon Screen  

SU-3100 

List all items of this typeWafer Cleaners - Other

in Wafer Cleaners

1   Dresden, Saxony
DNS, SU-3100, 300mm, Wafer Cleaning System:
DNS, SU-3100, 300mm, Wafer Cleaning system
Gate clean capable tool


178393
E-SUN Systems  

E-SUN Systems  

SEMI AUTO POD CLEANER 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
E-SUN System, SEMI AUTO POD CLEANER , 200mm:
SEMI AUTO POD CLEANER  Manufactured in 2008; Status: Cold Shutdown
197665
Ebara  

Ebara  

EPO-113 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
Ebara, EPO-113, 200mm CMP, Oxide:
Ebara, EPO-113, 200mm CMP, Oxide

S/N : PPE70329EY

Bagged & Skidded in warehouse


190267
Fisher Sci  

Fisher Sci  

FD400 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
Fisher Scientific, FD400, Precision Binder, 200mm:
Fisher Scientific, FD400, Precision Binder oven

s/N: 950015
178394
Harmotec  

Harmotec  

WPO-67-B 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
Harmotec, WPO-67-B, Wafer Packing, 200mm:
MaWPO-67-B. nufactured in 2008; Status: Unhooked
178426
Hugle  

Hugle  

UPC-12100 

List all items of this typeWafer Cleaners - Other

in Wafer Cleaners

1   F* Taichung, Taichung City
Hugle, UPC-12100 FOUP Cleaning, 300mm:
UPC-12100 Manufactured in 2007; Status: Bagged and Skidded
190998
Lesker  

Lesker  

Aluminum Evaporator 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Burlington, Vermont
LesKer, Aluminum Evaporator, 200mm, KJLC Custom Deposition System:
Kurt J. Lesker, Aluminum Evaporator, 200mm,
S/N: 384881-2
P.N.: EJ9904111
181814
Nitto Denko  

Nitto Denko  

HMT840 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
NITTO DENKO, HMT840, 200mm, Manual Defoiler:
NITTO DENKO, HMT840, 200mm, Manual Defoiler

Tool ID: MDTAPE-01
189685
Novellus Systems  

Novellus Systems  

Inova PVD 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
Novellus, Inova, PVD, 200mm, Sputter Dep, Cu Seed:
Novellus, Inova, PVD, 200mm, Sputter Dep, Cu Seed

!!!MULTIPLE UNITS AVAILABLE!!!  Please Inquire.

S/N: M12949A

Major Parts Missing

Missing/Faulty Parts:

DMC LF Generator
DMC Turbo Pump
CU ESC Trek Supplier
Mydax Chiller 
Polycold 
Cu Chamber Water Box
Cu Chamber Trust Controller
Cu Chamber SIOC
Ta Chamber Trust Controller
Ta Chamber SIOC
Degas EV Block
Ta EV Block
Transfer/loader Gate Valve
Internet Hub Box
PVD Chamber Quartz Lamp
Loader Ion Gauge
Ta Chamber Source Interlock Cable Assy
Aligner lamp
HF match


MULTIPLE UNITS AVAILABLE-PLEASE INQUIRE

 

190262
Novellus Systems  

Novellus Systems  

Inova PVD 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
Novellus, Inova, PVD, 200mm, Sputter Dep, Cu Seed:
Novellus, Inova, PVD, 200mm, Sputter Dep, Cu Seed

!!!MULTIPLE UNITS AVAILABLE!!!  Please Inquire.

This Unit is MISSING MAJOR PARTS!!! 

Missing/Faulty Parts
DMC LF Generator
DMC Turbo Pump
Cu Chamber Water Box
Cu Chamber SIOC
Ta Chamber SIOC
Degas EV Block
Ta EV Block
PVD Chamber Quartz Lamp
Loader Ion Gauge
Aligner lamp
HF match
Degas table






MUTLIPLE UNITS AVAILABLE-PLEASE INQUIRE


195482
Novellus Systems  

Novellus Systems  

Inova PVD 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Malta, New York
Novellus, Inova, PVD, 300mm, Sputter Dep, :
Novellus, Inova, PVD, 300mm, Sputter Dep, 

2 Chamber PVD TiN

195988
Novellus Systems  

Novellus Systems  

Inova PVD 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
Novellus, Inova, PVD, 300mm, Sputter Dep, :

Novellus, Inova, PVD, 300mm, Sputter Dep,


!!! MULTIPLE UNITS AVAILABLE.  PLEASE INQUIRE !!!

195980
Phoenix  

Phoenix  

Micromex SE 160T 

List all items of this typeXray Diffractometers

in Wafer Manufacturing Metrology Equipment

1   Dresden, Saxony
Phoenix Micromex SE 160T, 300mm, Xray Inspection:
Phoenix Micromex SE 160T, 300mm, Xray Inspection


183167
Revera  

Revera  

Veraflex 

List all items of this typeXray Diffractometers

in Wafer Manufacturing Metrology Equipment

1   F* Singapore,
Revera Veraflex, 300mm, XPS, HKMG Measurement:
Revera Veraflex, 300mm, XPS, HKMG Measurement System
X-Ray Photoelectron Spectroscopy (XPS)

TOOL ID: DXPS701
S/N: 080220
2008 Vintage
Bagged and Skidded in Warehouse
192943
Revera  

Revera  

RVX 5000 

List all items of this typeXray Diffractometers

in Wafer Manufacturing Metrology Equipment

1   F* Dresden, Saxony
Revera, RVX5000, XRay Measurement, 300mm, :
Revera, RVX5000, XRay Measurement, 300mm, 

Cold Idle,  In Fab

S/N : 655000

DOM : May, 2005
178431
Revera  

Revera  

RVX5000 

List all items of this typeXray Diffractometers

in Wafer Manufacturing Metrology Equipment

1   F* Taichung, Taichung City
REVERA, XPS, 300mm:
Manufactured in 2006; Status: Bagged and Skidded
195386
Rigaku  

Rigaku  

3620 

List all items of this typeXray Diffractometers

in Wafer Manufacturing Metrology Equipment

1   East Fishkill, New York
Rigaku, 3620, X-Ray Spectrometer, 200mm:
Rigaku, 3620, X-Ray Spectrometer, 200mm

S/N : LR42019
178432
Rigaku  

Rigaku  

3272 

List all items of this typeXray Diffractometers

in Wafer Manufacturing Metrology Equipment

1   F* Malta, New York
Rigaku, XRF, 300mm:
Status: Deinstalled
187643
Sanyo  

Sanyo  

SWH80 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
SANYO, SWH80, 200mm, Wet Photoresist Strip:
SANYO, SWH80, 200mm, Wet Photoresist Strip

S/N: D208669501


187642
SCP 8500, 200mm, Wet Bench, Backend, TW Reclaim 
SCP 8500, 200mm, Wet Bench, Backend, TW Reclaim 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
SCP 8500, 200mm, Wet Bench, Backend, TW Reclaim:
SCP 8500, 200mm, Wet Bench, Backend, TW Reclaim

S/N: 09538-01
In the fab - running.
191188
Santa Clara Plastics  

Santa Clara Plastics  

8500 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
SCP 8500, 200mm, Wet Bench, Backend, TW Reclaim:

SCP 8500, 200mm, Wet Bench, Backend, TW Reclaim

S/N: 09539-01

Manufactured in 2000

192941
Steag Hamatech  

Steag Hamatech  

ASP - 5500 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Burlington, Vermont
Steag-Hamatech, ASP-5500, Aqueous Mask Processor, Develop & Bake, Mask Tool :
Steag-Hamatech, ASP-5500, Aqueous Mask Processor, Develop & Bake, Mask Tool

S/N : 21202

DOM: 2002

186719
Tokyo Electron Ltd  

Tokyo Electron Ltd  

TE 8500PE  

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
TEL TE 8500PE, Oxide Etch, 200mm:
TEL TE 8500PE, Oxide Etch, 200mm
Located in the Fab
197175
Ulvac  

Ulvac  

CERAUS Zi 1000 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
ULVAC, CERAUS Zi 1000, 200mm, PVD, Sputter Deposition, 200mm:
ULVAC, CERAUS Zi 1000, 200mm, PVD, Sputter Deposition, 200mm

6 Chambers included:
2 x ICP,
3 x PVD LTS
1 x Degas

The following parts have been removed from the tool.

NoLocation ModelDescriptionQty
1Main bodyMain CPU1
2Main bodyMini PC6
3Main bodyMonitor1
4Main bodyCold trap3
5Main bodyTurbo pump3
6AC rackDC power supply3
7AC rackRF Generator1
8AC rackHelium Compressor1
9Facility Heat exchanger1
  Total20



197177
Ulvac  

Ulvac  

CERAUS Zi 1000 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
ULVAC, CERAUS Zi 1000, 200mm, PVD, Sputter Deposition, 200mm:
ULVAC, CERAUS Zi 1000, 200mm, PVD, Sputter Deposition, 200mm

6 Chambers included:
1 x ICP,
4 x PVD LTS
1 x Degas

The following parts have been removed from the tool.

NoLocation ModelDescriptionQty
1Main bodyMain CPU1
2Main bodyMini PC6
3Main bodyMonitor1
4Main bodyCold trap4
5Main bodyTurbo pump4
6AC rackDC power supply4
7AC rackRF Generator1
8AC rackHelium Compressor1
9Facility Heat exchanger1
  Total23
197178
Ulvac  

Ulvac  

CERAUS Zi 1000 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
ULVAC, CERAUS Zi 1000, 200mm, PVD, Sputter Deposition, 200mm:
ULVAC, CERAUS Zi 1000, 200mm, PVD, Sputter Deposition, 200mm

6 Chambers included:
1 x ICP,
4 x PVD LTS
1 x Degas

The following parts have been removed from the tool.

NoLocation ModelDescriptionQty
1Main bodyMain CPU1
2Main bodyMini PC6
3Main bodyMonitor1
4Main bodyCold trap4
5Main bodyTurbo pump4
6AC rackDC power supply4
7AC rackRF Generator1
8AC rackHelium Compressor1
9Facility Heat exchanger1
  Total23

197180
Ulvac  

Ulvac  

CERAUS Zi 1000 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Singapore,
ULVAC, CERAUS Zi 1000, 200mm, PVD, Sputter Deposition, 200mm:
ULVAC, CERAUS Zi 1000, 200mm, PVD, Sputter Deposition, 200mm

S/N ME99-9008

6 Chambers included:
1 x ICP,
4 x PVD LTS
1 x Degas

The following parts have been removed from the tool.

NoLocation ModelDescriptionQty
1Main bodyMain CPU1
2Main bodyMini PC6
3Main bodyMonitor1
4Main bodyCold trap4
5Main bodyTurbo pump4
6AC rackDC power supply4
7AC rackRF Generator1
8AC rackHelium Compressor1
9Facility Heat exchanger1
  Total23

180747
Unaxis  

Unaxis  

Clusterline 300 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Dresden, SN
UNAXIS, CLUSTERLINE 300, 300mm, PVD, 5chamber UBM sputter Tool :
UNAXIS, CLUSTERLINE 300, 300mm, PVD, 5chamber UBM sputter Tool
UNAXIS(Oerlikon), CLUSTERLINE 300, 300mm, PVD
TOOL ID:MDX222Y1
S/N :P7808 (10179784)

Configuration:: 1 x Degas, 1 x PVE Arctic 3 x PVD clampless
Dual Server/Arctic Softetch with clampless PVD upgd
Last operated Nov 13, 2015
2006 Vintage

178725
USHIO, Inc.  

USHIO, Inc.  

UMA-2003 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Taichung, Taichung City
Ushio UMA-2003 , 300mm , Resist Cure:
Resist Bake UV Cure, 
Photoresist Stabiliazation

193103
Westech  

Westech  

372M 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Burlington, Vermont
WESTECH, 372M, CMP, 200mm, Oxide, STI:
WESTECH, 372M, CMP, 200mm, Oxide, STI

S/N : 372M-067

Installed. Warm Idle.
193104
Westech  

Westech  

372M  

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Burlington, Vermont
WESTECH, 372M, CMP, 200mm, Oxide, STI:
WESTECH, 372M, CMP, 200mm, Oxide, STI

S/N : 372M-066

In the fab.  Warm idle.
193105
Westech  

Westech  

372M 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Burlington, Vermont
WESTECH, 372M, CMP, 200mm, Oxide, STI:
WESTECH, 372M, CMP, 200mm, Oxide, STI

193106
Westech  

Westech  

372M 

List all items of this typeWafer Production Equipment - Other

in Production Equipment

1   Burlington, Vermont
WESTECH, 372M, CMP, 200mm, Oxide, STI:
WESTECH, 372M, CMP, 200mm, Oxide, STI

S/N : 372M-126


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Wafer Manufacturing Equipment:
Akrion, Applied Komatsu Technology, Applied Materials, Inc., AXIDEN, Canon Anelva, Carl Zeiss, Dainippon Screen Mfg. Co., Ltd., E-SUN Systems, Ebara, Fisher Scientific, Harmotec, Hugle, Lesker, Nitto Denko, Novellus Systems, Phoenix, Revera, Rigaku, Santa Clara Plastics, Sanyo, Steag Hamatech, Tokyo Electronics Limited, Ulvac, Unaxis, USHIO, Inc., Westech