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Lithography Equipment


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Group Listings into sub-categories under Lithography EquipmentGroup Listings into sub-categories under Lithography Equipment

List all 20 product types under Lithography EquipmentList all 20 product types under Lithography Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
257175
AMAT  

AMAT  

Verity2 SEM 

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AMAT Verity2, 300mm, s/n: U755:
1   N* Singapore,
254474
ASML  

ASML  

AT400C 

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ASML AT400C, 300mm, s/n: 3505:
1   Singapore,
254366
ASML  

ASML  

AT850C 

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ASML AT850C, 300mm, s/n: 6206:
1   Singapore,
254365
ASML  

ASML  

AT850C 

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ASML AT850C, 300mm, s/n: 8163:
1   Singapore,
254257
ASML  

ASML  

NXT1950i 

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ASML NXT1950i, 300mm, s/n: m3550:
1   Malta, New York
254256
ASML  

ASML  

NXT1950i 

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ASML NXT1950i, 300mm, s/n: m5190:
1   Malta, New York
254107
ASML  

ASML  

NXT1950i 

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ASML NXT1950i, 300mm, s/n: m5828:
1   Malta, New York
254111
ASML  

ASML  

XT1400E 

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ASML XT1400E, 300mm, s/n: 4393:
1   Singapore,
254110
ASML  

ASML  

XT1900Gi 

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ASML XT1900Gi, 300mm, s/n: 5884:

Immersion scanner

1   Singapore,
254199
ASML  

ASML  

Yieldstar S-200B 

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ASML Yieldstar S-200B, 300mm, s/n: 9745:
1   Dresden, Saxony
254167
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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AXCELIS PCU 200, 200mm, s/n: PU0C427A:
1   Singapore,
254164
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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AXCELIS PCU 200, 200mm, s/n: PU6C288X:
1   Singapore,
254163
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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AXCELIS PCU 200, 200mm, s/n: PU6C289X:

PHOTOSTABILIZER

1   Singapore,
254165
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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AXCELIS PCU 200, 200mm, s/n: PU7B354A:
1   Singapore,
254166
Axcelis Technologies  

Axcelis Technologies  

PCU 200 

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AXCELIS PCU 200, 200mm, s/n: PU7K392A:
1   Singapore,
250700
Canon  

Canon  

3000i4 

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Canon FPA 3000 i4 Stepper :

Only for sale for an competetive price!

 

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
250701
Canon  

Canon  

3000i4 

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Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1   Dresden, Saxony
254473
InnerSense  

InnerSense  

Load Port - P/N: ALP613A 

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InnerSense Load Port - P/N: ALP613A, 300mm, s/n: 0028:
1   Dresden, Saxony
254364
InnerSense  

InnerSense  

Load Port - P/N: ALP613A 

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InnerSense Load Port - P/N: ALP613A, 300mm, s/n: 0030:
1   Dresden, Saxony
253369
KLA-Tencor  

KLA-Tencor  

5200 

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KLA Tencor 5200, 200mm, s/n: 2070:
1   Burlington, Vermont
254368
KLA-Tencor  

KLA-Tencor  

TERON 650 

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KLA TERON 650, 300mm, s/n: SN6028:
1   Malta, New York
254226
Lasertec  

Lasertec  

BI100 

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Lasertec BI100, s/n: BA002A408JR:

EUV Reticle Back Side Inspection

1   Malta, New York
257163
Nikon  

Nikon  

NSR-S208D 

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NIKON NSR-S208D, 300mm, s/n: S62A0560001:
1   N* Dresden, Saxony
257165
Nikon  

Nikon  

NSR-S208D 

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NIKON NSR-S208D, 300mm, s/n: S62A0831703:
1   N* Dresden, Saxony
257164
Nikon  

Nikon  

NSR-S208D 

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NIKON NSR-S208D, 300mm, s/n: S62A1052102:
1   N* Dresden, Saxony
254329
Nikon  

Nikon  

S208D 

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NIKON S208D, 300mm, s/n: 8732034:
1   Singapore,
248319
Nikon  

Nikon  

NSR-2205EX14C 

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Nikon, NSR-2205EX14C, 200mm, S/N 7573113:

Nikon, NSR-2205EX14C, 200mm, S/N 7573113

1   Singapore,
248320
Nikon  

Nikon  

NSR-2205EX14C 

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Nikon, NSR-2205EX14C, 200mm, S/N 7573120:

Nikon, NSR-2205EX14C, 200mm, S/N 7573120

1   Singapore,
249907
Nikon  

Nikon  

NSR-S208D 

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NIKON, NSR-S208D, 300mm, s/n: 8732039. LKSC760:

NIKON Main Body

1   Singapore,
247027
Nikon  

Nikon  

NSR-S208D 

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NIKON, NSR-S208D, 300mm, s/n: 8732048:

NIKON, NSR-S208D, 300mm, s/n: 8732048

Lithography Step and repeat scanning system

1   Dresden, Saxony
247605
Nikon  

Nikon  

NSR-S208D 

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NIKON, NSR-S208D, 300mm, s/n: S62 0290202:

Lithography Step and repeat scanning system

1   Dresden, Saxony
249036
Suss MicroTec  

Suss MicroTec  

ACS200 Gen3 

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Suss ACS200 Gen3, sn: ACS300GEN2-001151, 300 mm:

Suss ACS200 Gen3, sn: ACS300GEN2-001151, 300 mm

Suss spray coater

1   East Fishkill, New York
254475
Tel  

Tel  

ACT12 

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TEL ACT12, 300mm, s/n: E220523:
1   Singapore,
254137
Tel  

Tel  

ACT8 

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TEL ACT8, 200mm, s/n: 9212090:
1   Singapore,
250840
Tel  

Tel  

ACT8 

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TEL ACT8, 200mm, sn: 9100970:
1   Singapore,
250841
Tel  

Tel  

ACT8 

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TEL ACT8, 200mm, sn: 9101054:
1   Singapore,
250847
Tel  

Tel  

ACT8 

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TEL ACT8, 200mm, sn: 9101544:
1   Singapore,
254477
Tel  

Tel  

LITHIUS PRO-I 

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TEL LITHIUS PRO-I, 300mm, s/n: N150752:
1   Singapore,
254106
Tel  

Tel  

Lithius ProV 

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TEL Lithius ProV, 300mm, s/n: MDV120316:
1   Malta, New York
254101
Tel  

Tel  

Lithius ProVi 

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TEL Lithius ProVi, 300mm, s/n: V110231:

Immersion Coat and Develop

1   Malta, New York
254102
Tel  

Tel  

Lithius ProVi 

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TEL Lithius ProVi, 300mm, s/n: V110233:

Immersion Coat and Develop

1   Malta, New York
254103
Tel  

Tel  

Lithius ProVi 

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TEL Lithius ProVi, 300mm, s/n: V120318:

Immersion Coat and Develop

1   Malta, New York
254240
Tel  

Tel  

Lithius ProVi 

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TEL Lithius ProVi, 300mm, s/n: V120377:
1   Malta, New York
255441
Tel  

Tel  

LITHIUS 

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TEL LITHIUS, 300mm, s/n: MD-G360588:
1   Dresden, Saxony
257159
Tel  

Tel  

LITHIUS 

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TEL LITHIUS, 300mm, s/n: MD-G360588:

2-Block-Machine

1   N* Dresden, Saxony
257160
Tel  

Tel  

LITHIUS 

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TEL LITHIUS, 300mm, s/n: MD-G360844:

2-Block-Machine

1   N* Dresden, Saxony
255442
Tel  

Tel  

LITHIUS 

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TEL LITHIUS, 300mm, s/n: MD-G360844:
1   Dresden, Saxony
255443
Tel  

Tel  

LITHIUS 

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TEL LITHIUS, 300mm, s/n: MDG360846:
1   Dresden, Saxony
257161
Tel  

Tel  

LITHIUS 

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TEL LITHIUS, 300mm, s/n: MDG360846:

2-Block-Machine

1   N* Dresden, Saxony
251087
Tel  

Tel  

MARK8 

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TEL MARK8, 200mm, s/n: 8181620:
1   Singapore,
250488
Tel  

Tel  

MK7-S 

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TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A1
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 Last Time in production 1/1/24

 

1   Dresden, Saxony
250489
Tel  

Tel  

MK7-S 

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TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

Last Time in production 1/1/24

 

1   Dresden, Saxony
250490
Tel  

Tel  

MK7-S 

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TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

1   Dresden, Saxony
250491
Tel  

Tel  

MK7-S 

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TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#2
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Shinwa CP-I
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 

Last time in production: 01.01.24

1   Dresden, Saxony
254104
Tel  

Tel  

PROi 

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TEL PROi, 300mm, s/n: N100355:

Cot / DEV

1   Dresden, Saxony
257162
Tel  

Tel  

ProZ 

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TEL ProZ, 300mm, s/n: Z111637:
1   N* Malta, New York
254241
Tel  

Tel  

ProZ 

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TEL ProZ, 300mm, s/n: Z111638:
1   Malta, New York
249204
Tokyo Electron Limit  

Tokyo Electron Limit  

LITHIUS I+ 

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TEL, LITHIUS I+, 300mm, S/N G481358:

TEL, LITHIUS I+, 300mm, S/N G481358

1   Singapore,
233207
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Lithius 

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TEL, Lithius, 300mm, S/N G260815:

TEL, Lithius, 300mm, S/N G260815

1   Singapore,
245289
Tokyo Electron Limit  

Tokyo Electron Limit  

8181523 

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TEL, Mark 8, 200mm, S/N 8181523:

TEL, Mark 8, 200mm, S/N 8181523

SOG Coater. 2 coaters only.

1   Singapore,


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Lithography Equipment:
AMAT, ASML, Axcelis Technologies GmbH, Canon, InnerSense, KLA-Tencor, Lasertec, Nikon, Nikon, Suss MicroTec, Tel, Tokyo Electron Limited, Tokyo Electronics Limited