Canon FPA 3000 i5+

General Configuration:

• FPA 3000 - i5(+)
• Manufactured in  June / 1997
  • 8“ Wafer Chuck, Notch PA unit
  • 6“ Nikon-type Reticle Changer
  • Reticle Barcode-Reader =   yes
  • Cassette Barcode Reader = yes
  • Pellicle Particle Checker =   yes
  • Online - ESPA =   yes
  • Interface type:   right
  • Standard flys eye lens
  • Chamber type: CD80

TEL ACT12 - Double Block - 300mm + LITVC1-02

no missing parts, no damage

'- 12" Standard Wafer Chuck and 12" wafer handling system - SMIF type reticle loading ports and reticle changer unit- Pellicle Particle checker installed

- Hg-lamp will be rmoved prior shipping- Coolant will be removed prior shipping- all batteries will be removed prior shipping