KLA-TENCOR ASET-F5x Thin Film Measurement System

• Serial Number 0202802R
• Manufactured in June, 2002
• Inspection Modes Include:
  • Dual Beam Spectrometry
  • Spectroscopic Ellipsometry
  • Film Stress Analysis
  • SUMMIT™ Application Software Version 3.21.16
  • FTML Version 3.46.06
  • Model 300DFF1P Wafer Loading Platform
    • Dual Loadports for 300mm Wafers
    • Three Axis Wafer Handling Robot
    • GEM / SECS Communication
    • Inquire for Additional Details

KLA-TENCOR HRP-240 High Resolution Profiler

• Cassette to Cassette Wafer Handling for up to 200mm Wafers
• Previously Configured for SMIF Wafer Handling
• Please Inquire for Additional Details

TENCOR Surfscan 4500 Unpatterned Wafer Surface Inspection Tool

• Cassette to Cassette Handling of 3” – 6” Wafers
• New HeNe 2mW Laser, 632.8 nm Wavelength
• New HeNe Laser Power Supply
• 2 µ Particle Size Sensitivity
• Automatic Calibration
• Flatscreen Monitor
• System Calibrated & Demonstrated
• Calibration Standard Wafer Included

KLA-TENCOR Spectra fx Single Wave Ellipsometer Kit

KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

• ETAL Stage
• Yaskawa Robot with NXC100 Controller
• IDE Maxon 1000 Floatation Controller

KLA-TENCOR Puma 9130 Darkfield Inspection Tool

• Parts Tool
• Please Inquire for Additional Details

KLA-TENCOR Puma 9120 IS Darkfield Inspection Tool

• For 200mm or 300mm Wafers
• 2ea Cameras
• Please Inquire for Additional Details

KLA-TENCOR Aleris 8350 Advanced Film Metrology Tool

• Dual 300 mm Loadports
• Analysis of 190nm-800nm Wavelengths
• White Light Reflectometer
• Broadband Spectroscopic Ellipsometer
• Single Wave Ellipsometer
• Stress Measurement
• iDesorber 

KLA-Tencor UV-1050 Thin Film Measurement Tool

• Cassette to Cassette Wafer Handling
• Wafer sizes: 100mm, 150mm & 200mm
• Broadband UV Optics
• Dual Beam Spectrophotometry
• Applications: Polysilicon, UV Reflectivity & Simultaneous Oxide and TiN Thickness for CMP
• System Control PC with Windows NT OS
• Summit Application Software
• GEM / SECS Communication
• System Installation at Destination Available