PlasmaQuest Microwave-ECR Plasma system
- This 6-inch Load-Lock PlasmaQuest high density plasma tool was built for for plasma etching, but also offers potential as a unique PECVD deposition tool.
- Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
- ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
- Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
- Originally equipped with a 1000W, but higher input power may be viable.
- Both "as is" sale as well as full refurbishment for etch and/or PECVD processing can be considered.
- Configured with 2 modules including power & controls rack and vacuum module.