Manufacturer: Wavemat

  1. Wavemat 915 MHz MPCVD Diamond Growth System

    Single Chamber PECVD Tools

    Wavemat 915 MHz MPCVD Diamond Growth System

    Cline Innovations is offering a Wavemat 915MHz microwave CVD diamond growth system.  This deposition system is recommended for synthetic diamond growth and/or large area plasma equipment development purposes. 

    This system is capable of operation over a broad parametric space including 1.) large volume/diameter, low plasma power densities using a thermally-floating stage design or 2.) confined volume/diameter higher plasma power densities using a water-cooled stage design.  

    Major System Features:

    • Wavemat 915MHz internally-tunable microwave plasma apparatus.
    • Nominally 10-inch diameter fused quartz bell jar enables handling of large area fixtures and substrates.
      • Roughly 4.5" processing diameter with water-cooled stage.
      • Roughly 6.0" processing diameter with thermally-floating stage.
      • Larger area processing may certainly be possible with system modifications, enhanced cooling.
      • Double-jacketed stainless steel loading chamber mounted to a sturdy welded steel frame with thick aluminum tabletop.
      • Typically operated at power levels under 12kW.
      • Modular design enables application-specific modifications, plasma source development, etc.
      • PC-based LabView controls.